Deformable Mirror Non-Uniform Substrate Thickness
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Solution Overview
Problem
Deformable mirrors used in wavefront aberration correction devices deviate from ideal surface shapes due to the flat shape of coupling portions, leading to incomplete aberration correction and reduced optical characteristics such as resolving power.
Innovation Solution
A deformable mirror with a mirror substrate having continuous reflective surfaces and actuators connected via coupling portions, where the substrate has thinner regions around the coupling portions to facilitate deformation and maintain an ideal surface shape, manufactured using a method involving a silicon-on-insulator substrate with thin regions formed around coupling portions and a reflective film.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the coupling portions are made flat to connect actuators to the mirror substrate, then the connection strength is improved, but the mirror surface shape deviates from the ideal shape due to reduced deformation capability around the coupling portions
Solution Approach 1:
The mirror substrate is designed with non-uniform thickness: thicker regions at the coupling portions to enhance connection strength, and thinner regions in the deformation areas to maintain ideal mirror surface shape. This local variation in thickness allows each region to fulfill its specific function optimally.
Solution Approach 2:
The mirror substrate is segmented into distinct functional regions: coupling portions for actuator connection and deformation portions for shape control. This segmentation allows independent optimization of each region's properties without compromising the other.
2Duration of action of stationary object
If the mirror substrate thickness is increased to improve durability, then the structural strength is improved, but the ability to achieve ideal surface shape through deformation is reduced
Solution Approach 1:
The mirror substrate employs local quality variation through non-uniform thickness distribution: thicker regions provide durability and structural support, while thinner regions enable precise deformation for ideal surface shape achievement.
Solution Approach 2:
The substrate is divided into structural support regions (thicker for durability) and functional deformation regions (thinner for shape control), allowing simultaneous optimization of both durability and surface shape precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The deformable mirror achieves a shape closer to the ideal surface shape, improving optical characteristics like resolving power and durability, and effectively corrects wavefront aberrations in optical systems.
Implementation Method 1
a plurality of electrostatic actuators, which are individually deformed by a plurality of electrostatic forces generated by application of voltage
Data Source
AI summary
A deformable mirror includes a mirror substrate having a continuous reflective surface and a plurality of actuators connected to the mirror substrate at a plurality of coupling portions. In the deformable mirror, the mirror substrate has first regions and a second region thicker than the first regions and the first regions are formed around the coupling portions.