Deformable Optical Element for Microlithography
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Solution Overview
Problem
In microlithography, existing optical imaging systems face challenges in achieving precise adjustment and maintenance of optical modules due to thermal and dynamic loads, leading to reduced component lifetime and increased complexity, especially with the need for robust and complex support structures and large installation spaces for deformation devices.
Innovation Solution
The implementation of an optical device with a replaceable optical module that includes active deformation units, allowing for easy replacement and integration into existing systems, using actuators with high rigidity to minimize space requirements and reduce system complexity, while maintaining high imaging quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If robust and complex support structures are used to maintain optical module position under thermal and dynamic loads, then reliability is improved, but device complexity increases
Solution Approach 1:
The support structure is divided into multiple independent support units distributed around the optical module. Each support unit independently supports the module at specific locations, allowing the system to maintain reliability while reducing overall complexity through modular design
Solution Approach 2:
The support units serve multiple functions: they provide mechanical support, enable thermal expansion accommodation, and facilitate easy replacement of the optical module. This multi-functionality reduces the need for separate specialized components, thereby reducing device complexity while maintaining reliability
2Manufacturing precision
If deformation devices with large travel ranges are used to correct imaging errors, then manufacturing precision is improved, but the installation space required increases
Solution Approach 1:
The deformation device uses actuators that can dynamically adjust the optical element's shape with small, precise movements rather than requiring large static travel ranges. This dynamic adjustment capability enables effective imaging error correction within a compact space
Solution Approach 2:
The system corrects imaging errors by changing the physical parameters (shape, curvature) of the optical element through controlled deformation, rather than requiring large positional movements. This parameter-based correction achieves high precision within limited space
3Ease of operation
If force actuators with low rigidity are used to generate deformation, then ease of operation is improved, but the installation space increases due to soft force flux direction
Solution Approach 1:
The system replaces traditional low-rigidity force actuators with high-rigidity actuators that directly generate deformation forces. This substitution eliminates the need for soft force flux transmission paths, reducing installation space while maintaining ease of deformation generation
Solution Approach 2:
The actuator system uses high-rigidity materials and structures that can generate required deformation forces without requiring large volumes. The composite design of the actuator and optical element assembly achieves both compact size and operational ease
Data Source
AI summary
The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.