Deformable Excess Overdrive Detection Structure for Probe Cards
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Solution Overview
Problem
Existing probe cards lack a method to quickly and inexpensively identify probes that have experienced excess overdrive, which can lead to damage and result in false positives or reduced production yield due to potential planarity issues.
Innovation Solution
A probe card with an excess overdrive detecting structure made of deformable material, positioned along the bending path of the probe, which permanently deforms upon excess overdrive, allowing for post-inspection identification of damaged probes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If probe cards are made with larger arrays of probes to increase testing efficiency, then productivity is improved, but the complexity of detecting and measuring excess overdrive increases
Solution Approach 1:
The probe card is divided into individual probe units, each with its own bending element and detection structure. This segmentation allows independent detection of excess overdrive for each probe, making the detection process manageable even as the overall array size increases.
Solution Approach 2:
A detection structure serves as an intermediary element between the bending element and the substrate. This intermediary permanently deforms when excessive force is applied, providing a tangible indicator of excess overdrive without requiring complex measurement systems.
2Reliability
If the probe card structure is made more complex to prevent excess overdrive damage, then reliability is improved, but device complexity increases
Solution Approach 1:
The detection structure is designed as a sacrificial, inexpensive element that can be permanently deformed without affecting the functionality of the expensive probe or wafer. This disposable-like approach protects valuable components while absorbing the cost of potential damage through the low-cost detection structure.
Solution Approach 2:
The detection structure acts as a pre-positioned protective element that absorbs excessive forces before they can reach and damage the probe or substrate. By placing this cushioning structure in advance along the bending path, damage prevention is achieved without requiring complex active control systems.
3Measurement precision
If inspection methods are made more sophisticated to detect excess overdrive, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The detection structure utilizes permanent deformation (analogous to color changes) as a visual indicator of excess overdrive. This permanent physical change provides immediate, unambiguous detection without requiring complex measurement procedures, thereby maintaining high measurement precision while minimizing inspection time.
Solution Approach 2:
The detection structure performs self-detection by permanently deforming under excessive force, automatically indicating the presence of excess overdrive without requiring external measurement systems or complex inspection procedures. This self-indicating mechanism eliminates time-consuming measurement processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables quick and inexpensive inspection to detect excess overdrive, preventing damage and reducing false positives by identifying permanently deformed regions, thus improving production yield and ensuring reliable testing.
Implementation Method 1
A probe card with an excess overdrive detecting structure made of deformable material, positioned along the bending path of the probe, which permanently deforms upon excess overdrive
Data Source
AI summary
A novel structure for a probe card that comprises a deformable metal or other deformable material for detecting excess overdrive and a method for using the same are disclosed. This detection structure may be positioned on the substrate along the bending path of the probe, such that should the probe experience excess overdrive, then the detection structure will permanently deform where it is hit by any portion of the probe. Alternatively, the detection structure may be embedded in the substrate, and may also function as a fiducial for alignment detection. Inspection of the probe card, and specifically the detection structure, will reveal whether any probe has experienced excess overdrive. Should the inspection reveal that certain regions of the card experienced excess overdrive, this may indicate a planarity problem that affects production line yield.