Deformable Substrate for Piezoelectric Fluid Control Device
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Solution Overview
Problem
The challenge in fluid control devices is precisely aligning flat-plate structures with rigidities, such as piezoelectric actuators and substrates, to maintain a specified gap for efficient fluid transportation, which becomes increasingly difficult during miniaturization, leading to reduced efficiency and noise generation due to assembling errors.
Innovation Solution
A deformable substrate with a flexible plate and communication plate is used, forming a synchronously-deformed structure that maintains a specified depth between the flexible plate and the vibration plate of the piezoelectric actuator, reducing assembling errors and enhancing fluid transfer efficiency while minimizing noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If rigid flat-plate structures (piezoelectric actuator and substrate) are used, then structural stability is improved, but manufacturing precision deteriorates due to difficulty in maintaining specified gap during miniaturization
Solution Approach 1:
The substrate is designed with deformable regions that can dynamically adjust their shape to compensate for misalignment between the piezoelectric actuator and substrate. This dynamic adaptation allows the system to maintain the specified gap even when rigid alignment is difficult to achieve during miniaturization assembly.
Solution Approach 2:
The substrate's physical parameters (shape, curvature) are changed from fixed rigid states to variable deformable states. By controlling the deformation of specific regions, the system can adjust the gap distance to match the piezoelectric actuator's requirements, thereby improving manufacturing precision without sacrificing structural stability.
2Ease of manufacture
If rigid flat-plate structures are used, then ease of manufacture is improved, but productivity deteriorates due to reduced fluid transportation efficiency from assembling errors
Solution Approach 1:
The deformable substrate automatically adjusts its configuration to optimize fluid flow paths and maintain proper gap distances, ensuring high fluid transportation efficiency even with simple assembly processes. This eliminates the need for complex precision alignment while maintaining productivity.
Solution Approach 2:
The substrate performs self-alignment through its deformable characteristics, automatically compensating for assembly variations. This self-correcting mechanism ensures optimal fluid transportation efficiency without requiring complex assembly procedures or additional alignment components.
3Device complexity
If rigid flat-plate structures are used, then device complexity is reduced, but object-generated harmful factors increase due to noise from contact interference
Solution Approach 1:
The deformable substrate maintains an optimal gap distance that prevents contact between the piezoelectric actuator and substrate during operation. This dynamic gap control eliminates mechanical contact and the associated noise, while the overall structural complexity remains low due to the simplicity of the deformable design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The deformable substrate's synchronously-deformed structure facilitates precise alignment and efficient fluid transfer, reducing noise and improving the overall performance of the fluid control device, especially in miniature components, by maintaining a consistent gap and preventing contact interference.
Implementation Method 1
The piezoelectric element is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element.
Implementation Method 2
The flexible plate and the communication plate are stacked on each other to form a synchronously-deformed structure. The deformable substrate is combined with and positioned on the vibration plate, maintaining a specified depth between them.
Data Source
Figure 1A
Figure 1B
Figure 2A
AI summary
A fluid control device (2) includes a piezoelectric actuator (23) and a deformable substrate (20). The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230). The piezoelectric element (233) is attached on a surface (230b) of the vibration plate (230). The piezoelectric element (233) is subjected to deformation in response to an applied voltage. The vibration plate (230) is subjected to a curvy vibration in response to the deformation of the piezoelectric element (233). The deformable substrate (20) includes a flexible plate (22) and a communication plate (21), which are stacked on each other. Consequently, a synchronously-deformed structure is defined by the flexible plate (22) and the communication plate (21) collaboratively. There is a specified depth (δ) between the flexible plate (22) and the vibration plate (230). The flexible plate (22) includes a movable part (22a) corresponding to the vibration plate (230).