Deformable Substrate Synchronous Deformation for Fluid Control
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Solution Overview
Problem
Conventional fluid control devices with flat-plate structures face challenges in precisely aligning the piezoelectric actuator and substrate to maintain a specified gap, leading to reduced fluid transportation efficiency and noise generation, especially as components miniaturize.
Innovation Solution
A manufacturing method involving a deformable substrate with a flexible and communication plate, where a bulge is formed on one surface and a movable part on the other, allowing for synchronous deformation to maintain a specified depth between the plates, reducing assembling errors and noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If flat-plate structures with certain rigidities are used for the piezoelectric actuator and substrate, then the structural stability is improved, but the alignment precision and gap maintenance capability deteriorate
Solution Approach 1:
The substrate is designed with deformable regions that can dynamically adjust their shape during the assembly process. By applying external forces to these deformable regions, the substrate can change its curvature to compensate for misalignment between the piezoelectric actuator and substrate, thereby maintaining the specified gap depth despite initial positioning errors.
Solution Approach 2:
The invention changes the physical state of the substrate from a rigid flat plate to a deformable structure with adjustable curvature. By controlling the degree of deformation through external forces applied to specific regions, the substrate can adapt its shape parameters to achieve precise gap maintenance, transforming a static structure into one with adjustable geometric parameters.
2Reliability
If the gap depth is increased to prevent contact between components, then the reliability is improved, but the fluid transportation efficiency deteriorates
Solution Approach 1:
The deformable substrate dynamically adjusts the gap depth between the piezoelectric actuator and substrate during operation. By controlling the deformation of specific regions, the system maintains an optimal gap depth that prevents contact between components while preserving fluid transportation efficiency, eliminating the need for a uniformly increased gap depth throughout the entire structure.
3Volume of moving object
If the device is miniaturized to reduce size, then the compactness is improved, but the alignment difficulty and assembling error increase
Solution Approach 1:
The deformable substrate with adjustable curvature provides a self-correcting mechanism that compensates for assembly errors in miniaturized devices. The external forces applied to deformable regions enable real-time adjustment of the substrate shape, allowing the system to maintain precise gap depths even when component sizes are reduced and assembly tolerances become tighter.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enhances fluid transfer efficiency and reduces noise by maintaining a precise gap between the deformable substrate and the piezoelectric actuator, improving the performance and user-friendliness of the fluid control device.
Implementation Method 1
In response to an applied voltage, the piezoelectric actuator 102 is subjected to deformation and a fluid is driven to flow through various chambers of the fluid control device 100
Implementation Method 2
a synchronous deformation process is implemented by applying at least one external force to the deformable substrate 20, so that the flexible plate 22 and the communication plate 21 of the deformable substrate 20 are subjected to a synchronous deformation
Data Source
Figure 1A
Figure 1B
Figure 2
AI summary
A manufacturing method of a fluid control device (2) is provided. Firstly, a housing (26), a piezoelectric actuator (23) and a deformable substrate (20) are provided. The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230) having a bulge (230c). The deformable substrate (20) includes a flexible plate (22) and a communication plate (21). The flexible plate (22) includes a movable part (22a). Then, the flexible plate (22) and the communication plate (21) are stacked on and coupled with each other to form the deformable substrate (20). Then, the housing (26), the piezoelectric actuator (23) and the deformable substrate (20) are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate (20), so that the flexible plate (22) and the communication plate (21) of the deformable substrate (20) are subjected to a synchronous deformation, and a specified depth (δ) between the movable part (22a) and the bulge (230c) of the vibration plate (230) is defined.