Deformable Substrate Table for Lithography
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Solution Overview
Problem
Existing lithographic apparatuses face challenges in accurately controlling the substrate table due to vibrations and deformations, which affect the precision of pattern transfer onto substrates, especially when using larger substrates that require more flexible and thinner tables to maintain usability without compromising rigidity.
Innovation Solution
A lithographic apparatus equipped with a substrate table that includes a plurality of sensors to measure deformation and actuators to dynamically adjust the table's shape, controlled by a controller to maintain desired accuracy and flatness, allowing for precise positioning and orientation of the substrate despite vibrations and deformations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the substrate table is made thinner and more flexible to accommodate larger substrates, then the usability and accessibility of the substrate table is improved, but the rigidity and stability of the substrate table deteriorates, leading to vibrations and deformations that affect positioning precision
Solution Approach 1:
The substrate table incorporates actuators that enable dynamic adjustment of the table's shape and position. This allows the table to adapt its rigidity and flatness in real-time during lithographic operations, compensating for deformations while maintaining ease of substrate loading and handling.
Solution Approach 2:
The system changes physical parameters of the substrate table by using actuators to adjust the table's shape, flatness, and position. These parameter adjustments allow the table to maintain structural integrity and positioning precision while accommodating larger, more flexible table designs for improved usability.
2Manufacturing precision
If sensors and actuators are added to control substrate table deformation, then the positioning precision and flatness control are improved, but the device complexity increases
Solution Approach 1:
Sensors are integrated into the substrate table to continuously monitor deformation, position, and flatness. This feedback is fed to a controller that adjusts actuator positions in real-time, creating a closed-loop control system that maintains positioning precision without requiring overly complex mechanical structures.
Solution Approach 2:
The patent replaces complex mechanical rigidity structures with a combination of sensors and actuators that actively control table shape and position. This substitution allows for a lighter, more flexible table design while maintaining precision through electronic control rather than purely mechanical means.
Data Source
AI summary
A lithographic apparatus includes a projection system, a substrate table, a plurality of sensors, an actuator and a controller. The projection system is configured to project a patterned beam of radiation onto a substrate. The substrate table is configured to support the substrate and to move relative to the projection system. The plurality of sensors is configured to measure a deformation of the substrate table. The actuator is configured to deform the substrate table. The controller is configured to control the actuator to deform the substrate table based on measurements made by the sensors. The plurality of sensors is located on a first side of the substrate table opposite to a second side of the substrate table facing the projection system. The plurality of sensors is substantially stationary relative to the projection system.