Deformation Member Liquid Immersion Exposure Apparatus Vibration Control
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Solution Overview
Problem
In exposure apparatuses used in photolithography, vibrations can lead to exposure failures, resulting in defective devices during the manufacturing process.
Innovation Solution
The exposure apparatus includes an optical member, a liquid immersion member with a movable part having a recovery mechanism and channels to manage the liquid, and a deformation member connected to the movable part, allowing for the recovery and flow of liquid to suppress vibrations and maintain a stable liquid immersion space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a liquid immersion space is formed using a movable member, then exposure precision is improved, but vibrations occur causing exposure failure
Solution Approach 1:
The patent employs flexible channels instead of rigid piping to connect the recovery part to the liquid supply. These flexible channels can deform and absorb vibrations generated by the movable member's movement, preventing vibration transmission that would cause exposure failure. The flexibility allows the system to maintain liquid immersion precision while accommodating mechanical movements without compromising reliability.
2Productivity
If the movable member moves during exposure processing, then productivity is improved, but liquid management becomes difficult causing vibrations
Solution Approach 1:
The patent implements a dynamic liquid management system where the recovery part and flexible channels adapt to the movable member's position changes in real-time. The flexible channels dynamically adjust their configuration as the movable member moves, maintaining stable liquid immersion without generating vibrations. This dynamic adaptation enables continuous exposure processing while preserving liquid immersion stability.
Solution Approach 2:
The flexible channel acts as an intermediary between the stationary recovery part and the movable liquid supply point. This intermediary component absorbs the mechanical stress and movement discrepancies, allowing the movable member to change position during exposure while maintaining stable liquid immersion and preventing vibration generation.
3Stability of the object's composition
If rigid channels are used for liquid flow, then structural stability is improved, but vibrations are transmitted causing exposure failure
Solution Approach 1:
The patent replaces rigid channels with flexible tubing or flexible channels that connect the recovery part to the liquid supply. These flexible channels maintain sufficient structural stability for liquid flow while inherently dampening vibrations through their flexibility. The flexible material absorbs vibrational energy, preventing its transmission to the liquid immersion space and thereby avoiding exposure failure.
Data Source
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AI summary
An exposure apparatus exposes a substrate with exposure light via a liquid. The exposure apparatus is provided with: an optical member having an emitting surface from which the exposure light is emitted; a liquid immersion member that is disposed at at least a portion of surrounding of an optical path of the exposure light, that is configured to form a liquid immersion space of the liquid on an object movable at below the optical member, and that has a movable member including a recovery part and a first channel, the recovery part being configured to recover at least a portion of the liquid in the liquid immersion space, the first channel being configured to flow the liquid from the recovery part; and a deformation member (i) that is connected to the movable member, (ii) that has a second channel configured to flow the liquid from the first channel, and (iii) that has at least a portion which is deformable.