Deformation Detection Sensor with Asymmetric Piezoelectric Films
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Solution Overview
Problem
Conventional deformation detection sensors for flexible substrates lack sufficient sensitivity in detecting bending deformation, necessitating an enhancement in detection capabilities.
Innovation Solution
A deformation detection sensor design featuring a flexible substrate with a first piezoelectric film on the upper surface and a second piezoelectric film on the lower surface, where the second film has a greater thickness than the first, allowing both sensors to bend and generate signals that, when processed by an arithmetic circuit, enhance the detection sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional deformation detection sensors are used, then the device structure is simple, but the detection sensitivity is insufficient
Solution Approach 1:
The sensor is divided into multiple independent piezoelectric films (first, second, third, and fourth piezoelectric films) positioned at different locations on the flexible substrate. Each film independently detects deformation at its specific location, and the arithmetic circuit processes signals from all films to calculate bending amount, thereby improving detection sensitivity through segmented measurement points.
Solution Approach 2:
Different piezoelectric films are positioned at specific locations (upper and lower surfaces, different regions) of the flexible substrate to detect local deformation characteristics. The first and second piezoelectric films are arranged to detect deformation in one direction, while the third and fourth films detect deformation in another direction, enabling localized and directional sensitivity enhancement.
2Measurement precision
If multiple piezoelectric films with different thicknesses are used, then detection sensitivity improves, but manufacturing complexity increases
Solution Approach 1:
The piezoelectric films are designed with different thickness parameters (first thickness for first piezoelectric film, second thickness for second piezoelectric film, third thickness for third piezoelectric film, fourth thickness for fourth piezoelectric film). This parameter variation allows each film to respond differently to deformation, improving detection sensitivity while maintaining manufacturability through controlled thickness variations.
3Ease of manufacture
If the sensor structure is simplified, then ease of manufacture improves, but noise interference increases
Solution Approach 1:
Multiple piezoelectric films are combined on a single flexible substrate, with their signals processed together by an arithmetic circuit. The first and second piezoelectric films are merged to detect deformation in one direction, while the third and fourth films are merged to detect deformation in another direction, allowing noise reduction through signal integration and differential processing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed sensor design significantly improves the sensitivity of deformation detection by generating a larger difference in signal potentials, reducing calculation load, and minimizing noise interference, thereby accurately calculating the bending amount of the flexible substrate.
Implementation Method 1
a first sensor provided on the substrate upper main surface and including a first piezoelectric film; and a second sensor provided on the substrate lower main surface and including a second piezoelectric film
Data Source
AI summary
A deformation detection sensor includes a bendable flexible substrate having a substrate upper main surface and a substrate lower main surface arranged in a vertical direction, a first sensor provided on the substrate upper main surface and including a first piezoelectric film, and a second sensor provided on the substrate lower main surface and including a second piezoelectric film. Thickness in the vertical direction of the second piezoelectric film is larger than thickness in the vertical direction of the first piezoelectric film, and the first sensor and the second sensor are bent as the flexible substrate is bent so as to project in an upper direction or a lower direction.


