Daisy-Chained Delay Cell Layout Without Interior Dummy Groups

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Solution Overview

Problem

Current semiconductor device designs require unnecessary dummy groups to protect delay cells from layout-dependent effects, leading to increased footprint and inefficiency, as they provide excessive protection in scenarios where no layout-dependent inducing cells are present between delay cells.

Innovation Solution

A semiconductor device design that arranges delay cells without additional dummy groups between them, optimizing the layout to maintain protection while reducing footprint, by using a sequence of dummy groups and delay cells where Σ(DG) < Σ(DC), and incorporating float-resistant inverters to manage signal delays effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If dummy groups are added between delay cells to protect from layout-dependent effects, then reliability is improved, but device area increases

Engineering Contradiction:
Improveprotection from layout-dependent effectsVSAvoiddevice footprint
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent applies local quality by making the protection structure non-uniform: dummy groups are placed only at the beginning and end of the delay cell chain, while the interior regions between delay cells are left empty. This localized approach provides protection where it is most needed (at boundaries) while avoiding unnecessary area consumption in the interior regions where layout-dependent effects are less critical.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent extracts and removes the unnecessary dummy groups from the interior regions between delay cells. By taking out these redundant protection elements, the design achieves significant area reduction while maintaining adequate protection through the boundary dummy groups at the chain ends.

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If dummy groups are placed between all delay cells, then protection from layout-dependent effects is maximized, but manufacturing efficiency decreases

Engineering Contradiction:
Improveprotection from layout-dependent effectsVSAvoidmanufacturing efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent implements local quality by concentrating dummy groups at specific locations (beginning and end of the chain) rather than uniformly distributing them. This localized protection strategy reduces the total number of dummy groups, thereby simplifying the manufacturing process and improving efficiency while maintaining effective protection against layout-dependent effects.

Inventive Principle:
Principle #3Local quality

3Reliability

If excessive dummy groups are used to protect delay cells, then reliability is improved, but device complexity increases

Engineering Contradiction:
Improveprotection from layout-dependent effectsVSAvoidlayout complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates excessive dummy groups from the interior regions between delay cells. By removing these redundant protection elements, the design significantly reduces layout complexity and simplifies the overall device structure while maintaining adequate protection through the essential boundary dummy groups.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of the conventional approach of uniformly distributing dummy groups between all delay cells, the patent inverts the strategy by placing dummy groups only at the boundaries and leaving the interior regions empty. This inverted approach reduces complexity while maintaining protection effectiveness.

Inventive Principle:
Principle #13The other way round (Inversion)

Data Source

PatentUS12015410B2Semiconductor device with daisy-chained delay cells and method of forming same
Publication Date: 2024.06.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12015410B2 patent drawing
  • US12015410B2 patent drawing
  • US12015410B2 patent drawing

AI summary

A semiconductor device includes a first dummy group having a first set of dummy transistors; a first delay cell having a first set of active transistors; a second delay cell having a second set of active transistors; a second dummy group having a second set of dummy transistors; and relative to a first direction the first and second dummy groups and the first and second delay cells being arranged in a first sequence arranged as the first dummy group, the first delay cell, the second delay cell, and the second dummy group; and the first and second delay cells being free from having another dummy group therebetween.