Delay Circuit Adjusts Shutter Timing for EUV Laser Stability

The patent implements a feedback mechanism where the actual high voltage pulse timing is detected and used to adjust the delay time in real-time. A timing detection unit measures the actual timing of the high voltage pulse, and a delay adjustment unit modifies the delay time based on the difference between actual and expected timing, thereby compensating for temperature variations and time drift while maintaining reasonable device complexity.

The patent transitions from a static fixed delay time to a dynamic adjustable delay time. The delay circuit incorporates a variable delay element that can be adjusted in real-time based on detected timing deviations, allowing the system to adapt to changing environmental conditions and maintain precision without excessive complexity.

The system uses feedback from timing detection to automatically adjust the delay time, eliminating the need for manual calibration while ensuring pulse width stability. The feedback loop continuously monitors and corrects timing deviations, maintaining stable pulse width without increasing operational complexity.

The delay circuit performs self-adjustment based on detected timing errors. The system automatically compensates for timing drift without requiring external intervention or complex manual adjustment procedures, thereby maintaining both operational simplicity and pulse width stability.

The patent employs feedback-based timing detection and adjustment that indirectly compensates for temperature variations. By continuously monitoring the actual high voltage pulse timing and adjusting the delay accordingly, the system compensates for temperature-induced drift without requiring direct temperature sensing or complex thermal management structures.

The system dynamically changes the delay time parameter in response to detected timing deviations caused by temperature variations. The delay circuit adjusts its operating parameter (delay time) to compensate for environmental changes, maintaining timing reliability without adding complex temperature compensation hardware.