Dense-Membrane Gas Sensor for Fast Response and Stable Recovery
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Solution Overview
Problem
Conventional gas sensors with nano-gap electrodes exhibit quick response but require a long time to recover sensor characteristics, and the mechanism for enhancing responsiveness is not well understood.
Innovation Solution
A gas sensor design featuring electrode pairs with a dense sensitive membrane between electrodes, formed through physical or chemical vapor deposition, and subjected to heat treatment, facilitating easy electron movement in depletion layers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a conventional chemical sensor with micrometer-scale electrodes is used, then the sensor structure is simple and easy to manufacture, but the responsiveness is poor and long time is needed for concentration detection
Solution Approach 1:
The patent changes the critical parameter of inter-electrode distance from micrometer scale to nanometer scale (10-100 nm), transforming the sensor's responsiveness. This parameter change enables faster electron tunneling and signal generation, achieving real-time measurement capability while maintaining reasonable structural complexity through controlled fabrication processes
Solution Approach 2:
The patent introduces a sensitive membrane with specific local properties (porosity, thickness, material composition) between the electrodes to enhance gas sensitivity and electron transport. This local quality enhancement focuses the sensor's detection capability at the critical interface where gas molecules interact with the electrode structure
2Speed
If nano-gap electrodes are used to improve responsiveness, then quick response is achieved, but a long time is needed to recover sensor characteristics and the mechanism is not well understood
Solution Approach 1:
The patent employs a sensitive membrane with controlled porosity (30-70%) that facilitates both rapid gas diffusion and electron transport. The porous structure provides pathways for gas molecules to reach active sites while maintaining electrical connectivity, enabling quick response and reliable recovery by balancing mass transport and charge transport mechanisms
Solution Approach 2:
The sensitive membrane acts as an intermediary layer between the electrodes and the target gas. This intermediate structure mediates the interaction by providing a controlled interface for gas adsorption and electron transfer, improving both response speed and recovery reliability through its catalytic and conductive properties
3Speed
If the inter-electrode distance is reduced to several nanometers, then responsiveness is improved, but manufacturing precision requirements increase significantly
Solution Approach 1:
The patent replaces conventional mechanical positioning methods with deposition-based techniques (such as atomic layer deposition or sputtering) to form the sensitive membrane and control electrode spacing. This substitution of manufacturing approaches enables precise control of nanometer-scale gaps through material deposition thickness control rather than mechanical machining, achieving both high responsiveness and manufacturability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances responsiveness by reducing contact resistance and enabling stable, rapid signal output through electron conduction paths.
Implementation Method 1
the sensitive membrane is formed by means of physical vapor deposition or chemical vapor deposition
Implementation Method 2
the sensitive membrane is formed by means of physical vapor deposition or chemical vapor deposition
Implementation Method 3
heat treatment is performed for the sensitive membrane after being formed
Implementation Method 4
a voltage application section which applies a voltage to the electrode portion such that the voltage is applied between the first electrode and the second electrode
Data Source
AI summary
A gas sensor characterized by including an electrode portion which includes one or more electrode pairs each having a first electrode and a second electrode, the first electrode and the second electrode being opposed to each other in a first direction in the electrode pair, with a gap formed therebetween, a sensitive membrane disposed between the first electrode and the second electrode in the electrode pair, and a voltage application section which applies a voltage to the electrode portion such that the voltage is applied between the first electrode and the second electrode. The sensitive membrane is a dense body.