Isotopically Depleted Silicon Layer for Stable Spin Qubits

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Solution Overview

Problem

The presence of silicon atoms with mass number 29, which have a non-integer nuclear spin, degrades the performance of spin qubits in quantum computers by causing decoherence and instability in qubit spin states.

Innovation Solution

The development of semiconductor structures that include an isotopically-depleted semiconductor layer, specifically depleted of silicon atoms with mass number 29, to reduce the concentration of these atoms below their natural abundance, thereby enhancing the stability and coherence of spin qubits.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If natural silicon material is used in the semiconductor layer, then the material is readily available and easy to manufacture, but the presence of silicon-29 isotopes causes decoherence and degrades spin qubit performance

Engineering Contradiction:
Improvespin qubit performanceVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent extracts and removes the harmful silicon-29 isotope from the semiconductor material while retaining the beneficial silicon-28 isotope. This is achieved through isotopic separation processes that deplete silicon-29 to concentrations below natural abundance levels, thereby eliminating the source of nuclear spin decoherence while preserving the semiconductor's functional properties

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the isotopic composition parameter of the silicon material from natural abundance to an enriched silicon-28 composition. By controlling the isotopic ratios during material synthesis or through post-processing isotopic separation, the semiconductor layer achieves enhanced spin coherence times while maintaining electrical and optical properties necessary for device operation

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If the concentration of silicon-29 atoms is reduced in the semiconductor layer, then decoherence is reduced and qubit stability is enhanced, but the manufacturing process becomes more complex and costly

Engineering Contradiction:
Improvequbit spin state stabilityVSAvoidisotopic depletion process complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent applies preliminary isotopic depletion to the silicon material before it is processed into the final semiconductor device structure. By performing isotopic separation and enrichment of silicon-28 in advance, the harmful silicon-29 isotope is removed before device fabrication begins, preventing decoherence issues from arising in the first place and simplifying subsequent manufacturing steps

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent creates a composite isotopic structure within the silicon material, combining highly enriched silicon-28 atoms with trace amounts of other silicon isotopes. This composite isotopic composition provides the dual benefit of minimizing nuclear spin interactions (through silicon-28 dominance) while maintaining the material's inherent semiconductor properties and crystal structure integrity

Inventive Principle:
Principle #40Composite materials

Data Source

PatentUS20250294837A1Structures including an isotopically-depleted semiconductor layer
Publication Date: 2025.09.18 GLOBALFOUNDRIES US INC
  • US20250294837A1 patent drawing
  • US20250294837A1 patent drawing
  • US20250294837A1 patent drawing

AI summary

Structures that include an isotopically-depleted semiconductor layer and methods of forming such structures. The structure comprises a semiconductor layer comprising a semiconductor material having an isotope with a concentration that is less than a natural abundance of the first isotope and greater than zero parts per million.