Vacuum Deposition Angle Restriction Plate Automatic Adjustment

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Solution Overview

Problem

Existing vacuum deposition apparatuses lack precise control over the spray angle of deposition materials, which can lead to inefficiencies and increased costs due to the need for manual adjustments and chamber openings for component replacements.

Innovation Solution

A vacuum powered deposition apparatus with a driving unit, linear motion unit, and angle restriction unit that allows for precise control of the spray angle through rotational and linear motion mechanisms, including a spur gear and guide system, enabling automatic adjustment of the angle restriction plate without opening the chamber.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual adjustment of angle restriction plate is used, then spray angle control is achieved, but chamber must be opened causing contamination risk and time loss

Engineering Contradiction:
Improvespray angle controlVSAvoidvacuum state maintenance
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The angle restriction plate is equipped with an automatic positioning mechanism that uses the deposition material flow itself to trigger and complete the angle adjustment, eliminating the need for manual intervention and maintaining vacuum integrity throughout the process

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The manual mechanical adjustment system is replaced with an automated mechanism that responds to deposition material flow, using the material flow as a trigger signal to initiate angle adjustment without requiring chamber opening

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If angle restriction plate replacement is performed manually, then spray angle adjustment is possible, but operation time increases and productivity decreases

Engineering Contradiction:
Improvespray angle adjustment capabilityVSAvoiddeposition rate
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The automatic positioning mechanism enables continuous deposition operations by performing angle adjustments during the deposition process itself, eliminating idle time between depositions and maintaining continuous productive action

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The angle restriction plate is pre-positioned using automatic mechanisms before deposition begins, and subsequent adjustments are triggered automatically by material flow, eliminating the need for time-consuming manual repositioning between operations

Inventive Principle:
Principle #10Preliminary action

3Ease of operation

If chamber is opened for angle restriction plate adjustment, then manual control is possible, but contamination risk increases

Engineering Contradiction:
Improvemanual control capabilityVSAvoidcontamination
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The system performs self-adjustment of the angle restriction plate through automated positioning mechanisms that are triggered and executed entirely within the closed chamber environment, eliminating the need for operator intervention and associated contamination risks

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for precise control of the deposition angle, reduces the time and cost associated with replacing components, maintains the vacuum state, and enhances operational efficiency by enabling consecutive deposition processes without interrupting the vacuum environment.

Implementation Method 1

vacuum powered deposition apparatus

Methodology Applied
Scientific EffectVacuum: Vacuum

Data Source

PatentUS9816172B2Vacuum powered deposition apparatus
Publication Date: 2017.11.14 SAMSUNG DISPLAY CO LTD
  • US9816172B2 patent drawing
  • US9816172B2 patent drawing
  • US9816172B2 patent drawing

AI summary

A vacuum powered deposition apparatus including a driving unit, a linear motion unit coupled to the driving unit and configured to move linearly according to operation of the driving unit, and an angle restriction unit coupled to the linear motion unit and configured to move in a direction perpendicular to that of the linear motion unit according to movement of the linear motion unit.