Deposition Apparatus Vertical Substrate Frame Control

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Solution Overview

Problem

Existing deposition methods for light emitting display devices face challenges in achieving accurate deposition of materials due to substrate sagging and distortion caused by gravity and thermal deformation, leading to inaccuracies in pixel position alignment.

Innovation Solution

A deposition apparatus with a vertically positioned deposition portion inclined at an angle of 4 to 14 degrees, featuring a frame supported by multiple stages that can move independently to correct distortions and prevent sagging, ensuring precise deposition accuracy by adjusting the frame's position to counteract distortion directions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the substrate is positioned horizontally during deposition, then the deposition process is simple to implement, but substrate sagging occurs due to gravity causing poor deposition pixel position accuracy

Engineering Contradiction:
Improvedeposition process simplicityVSAvoiddeposition pixel position accuracy
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The patent changes the substrate positioning from horizontal to vertical orientation, fundamentally altering the spatial dimension in which the deposition process occurs. This vertical positioning eliminates gravity-induced substrate sagging while maintaining deposition effectiveness, thereby resolving the contradiction between operational simplicity and deposition precision.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If the substrate is heated during deposition to improve material adhesion, then adhesion is enhanced, but thermal deformation occurs causing pixel position distortion

Engineering Contradiction:
Improvematerial adhesionVSAvoidpixel position accuracy
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent introduces a counterbalancing mechanism where the vertical positioning of the substrate acts as a counterweight to thermal expansion forces. By orienting the substrate vertically, the gravitational force counteracts the outward thermal expansion pressure, preventing pixel position distortion while maintaining the heating process for adequate adhesion.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

3Manufacturing precision

If multiple stages are added to support the frame and prevent sagging, then deposition accuracy is improved, but device complexity increases

Engineering Contradiction:
Improvedeposition accuracyVSAvoidnumber of support stages
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent divides the support function into multiple independent stages positioned at different locations along the substrate. Each stage independently supports a portion of the substrate weight, distributing the mechanical load and enabling precise positional control. This segmentation approach achieves high deposition accuracy while keeping each individual stage relatively simple in design.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively minimizes substrate sagging and distortion, maintaining stable support for the substrate during deposition, thereby improving deposition pixel position accuracy and preventing inaccuracies caused by gravity and thermal deformation.

Implementation Method 1

The deposition source may spray deposition material in a first direction that is parallel to the ground

Methodology Applied
Scientific EffectSpray: Fluid Spray

Implementation Method 2

The plurality of back stages may push the frame in a direction that is parallel to the first direction

Methodology Applied
Scientific EffectMechanical Force: Mechanical Force

Implementation Method 3

The plurality of lower stages may push the frame in a direction away from the ground

Methodology Applied
Scientific EffectMechanical Force: Mechanical Force

Data Source

PatentEP4324956A1Deposition apparatus
Publication Date: 2024.02.21 SAMSUNG DISPLAY CO LTD
  • EP4324956A1 patent drawingFigure 1
  • EP4324956A1 patent drawingFigure 2
  • EP4324956A1 patent drawingFigure 3

AI summary

A deposition apparatus according to an embodiment includes a deposition source, and a deposition portion that faces the deposition source. The deposition portion is disposed at an angle of about 4 degrees to about 14 degrees with respect to an imaginary vertical line that is perpendicular to ground. The deposition portion includes a frame including an opening, and an outer portion disposed around the opening, a substrate disposed on a first side of the frame, and a plurality of back stages disposed on a second side opposite to the first side of the frame. The frame moves by movement of the plurality of back stages.