Deposition Apparatus Vertical Substrate Frame Control
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Solution Overview
Problem
Existing deposition methods for light emitting display devices face challenges in achieving accurate deposition of materials due to substrate sagging and distortion caused by gravity and thermal deformation, leading to inaccuracies in pixel position alignment.
Innovation Solution
A deposition apparatus with a vertically positioned deposition portion inclined at an angle of 4 to 14 degrees, featuring a frame supported by multiple stages that can move independently to correct distortions and prevent sagging, ensuring precise deposition accuracy by adjusting the frame's position to counteract distortion directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the substrate is positioned horizontally during deposition, then the deposition process is simple to implement, but substrate sagging occurs due to gravity causing poor deposition pixel position accuracy
Solution Approach 1:
The patent changes the substrate positioning from horizontal to vertical orientation, fundamentally altering the spatial dimension in which the deposition process occurs. This vertical positioning eliminates gravity-induced substrate sagging while maintaining deposition effectiveness, thereby resolving the contradiction between operational simplicity and deposition precision.
2Reliability
If the substrate is heated during deposition to improve material adhesion, then adhesion is enhanced, but thermal deformation occurs causing pixel position distortion
Solution Approach 1:
The patent introduces a counterbalancing mechanism where the vertical positioning of the substrate acts as a counterweight to thermal expansion forces. By orienting the substrate vertically, the gravitational force counteracts the outward thermal expansion pressure, preventing pixel position distortion while maintaining the heating process for adequate adhesion.
3Manufacturing precision
If multiple stages are added to support the frame and prevent sagging, then deposition accuracy is improved, but device complexity increases
Solution Approach 1:
The patent divides the support function into multiple independent stages positioned at different locations along the substrate. Each stage independently supports a portion of the substrate weight, distributing the mechanical load and enabling precise positional control. This segmentation approach achieves high deposition accuracy while keeping each individual stage relatively simple in design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively minimizes substrate sagging and distortion, maintaining stable support for the substrate during deposition, thereby improving deposition pixel position accuracy and preventing inaccuracies caused by gravity and thermal deformation.
Implementation Method 1
The deposition source may spray deposition material in a first direction that is parallel to the ground
Implementation Method 2
The plurality of back stages may push the frame in a direction that is parallel to the first direction
Implementation Method 3
The plurality of lower stages may push the frame in a direction away from the ground
Data Source
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AI summary
A deposition apparatus according to an embodiment includes a deposition source, and a deposition portion that faces the deposition source. The deposition portion is disposed at an angle of about 4 degrees to about 14 degrees with respect to an imaginary vertical line that is perpendicular to ground. The deposition portion includes a frame including an opening, and an outer portion disposed around the opening, a substrate disposed on a first side of the frame, and a plurality of back stages disposed on a second side opposite to the first side of the frame. The frame moves by movement of the plurality of back stages.