Thin Film Deposition Apparatus with Segmented Barrier Plates
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Solution Overview
Problem
Conventional thin film deposition methods face challenges in manufacturing large-sized organic light-emitting display devices with high yield and efficiency, particularly in forming fine patterns on large substrates and achieving uniform light-emission efficiency across red, green, and blue sub-pixels.
Innovation Solution
A thin film deposition apparatus with a deposition source, nozzle unit, and patterning slit sheet, where the slit lengths are tailored for specific sub-pixel regions to control deposition material thickness, and barrier plates partition the deposition space to guide the material effectively, allowing simultaneous deposition on multiple sub-pixels with different thickness requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a conventional thin film deposition apparatus is used to form fine patterns on large substrates, then the substrate size can be increased, but the manufacturing precision and yield deteriorate
Solution Approach 1:
The deposition space is segmented into multiple sub-deposition spaces by barrier plates, allowing independent control of deposition conditions for different regions. The patterning slit sheet is divided into multiple patterning slits that can be independently optimized for different sub-pixel regions, enabling precise pattern formation across large substrates while maintaining manufacturing precision
Solution Approach 2:
Different regions of the deposition space are given different local characteristics through the barrier plate assembly and patterning slit sheet. Each sub-deposition space can have optimized deposition conditions tailored to specific sub-pixel requirements (red, green, blue), allowing large substrates to be processed with region-specific precision control
2Reliability
If intermediate layers are added to improve light-emission efficiency, then the device structure becomes more complex, but the manufacturing process becomes more difficult
Solution Approach 1:
Instead of adding more intermediate layers, the invention optimizes the deposition parameters (thickness, material composition, deposition conditions) of existing layers to achieve high light-emission efficiency. The barrier plate assembly enables precise control of deposition thickness and uniformity, allowing optimal performance with simplified layer structures
3Reliability
If different thicknesses are required for red, green, and blue sub-pixels, then the light-emission efficiency improves, but the deposition process complexity increases
Solution Approach 1:
The patterning slit sheet is divided into multiple patterning slits corresponding to different sub-pixel regions (red, green, blue). Each patterning slit can be independently designed with specific dimensions and configurations to achieve the required thickness variations for different colors, enabling precise control without increasing overall process complexity
Solution Approach 2:
Different sub-pixel regions are given different local deposition characteristics through the barrier plate assembly and patterning slit sheet configuration. Each region can have optimized thickness and material composition tailored to its specific color requirements, achieving high color emission efficiency while maintaining a unified deposition process
4Productivity
If mass production of large-sized devices is pursued, then the productivity increases, but the manufacturing precision and yield may deteriorate
Solution Approach 1:
The deposition space is segmented into multiple sub-deposition spaces that can be independently controlled and optimized. This segmentation allows each region to be processed with precise control parameters, maintaining high manufacturing precision even when producing large numbers of devices at mass production scale
Solution Approach 2:
The barrier plate assembly and patterning slit sheet configuration provides a universal solution that can handle multiple sub-pixel types (red, green, blue) and different deposition requirements within a single deposition chamber. This multi-functionality enables mass production of large-sized devices while maintaining consistent precision across all products
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances manufacturing yield and efficiency, enabling the production of large-sized organic light-emitting display devices with improved driving voltage, brightness, color purity, and light-emission efficiency by optimizing the thickness of auxiliary layers in red, green, and blue sub-pixels.
Implementation Method 1
a deposition source discharging a deposition material
Data Source
AI summary
A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits having different lengths arranged in the first direction; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, and the thin film deposition apparatus and the substrate are movable relative to each other.