Deposition Chamber Ground Strap Shielding Against Cleaning Gas Corrosion
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Solution Overview
Problem
In plasma-enhanced chemical vapor deposition processes, the ground strap in deposition devices corrodes during cleaning, leading to breakage and deposition failures due to exposure to cleaning gases like NF3, which react with materials like aluminum.
Innovation Solution
The deposition device incorporates a ground member with blocking parts and fixing members that shield the ground member from cleaning gases, preventing corrosion by directing the gases through outer peripheral surfaces and into suction members, thus maintaining the ground member's integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the ground strap is exposed to cleaning gases during the cleaning process, then the cleaning process can be performed to remove by-products, but the ground strap corrodes and may break
Solution Approach 1:
The ground member is divided into multiple ground straps, each independently supported by blocking parts. This segmentation allows selective protection of individual ground straps while maintaining overall grounding functionality.
Solution Approach 2:
Blocking parts are introduced as intermediary structures between the cleaning gas and the ground member. These blocking parts shield the ground member from direct exposure to corrosive cleaning gases, preventing corrosion while allowing the cleaning process to proceed.
2Reliability
If the ground member is shielded from cleaning gases using blocking parts, then corrosion is prevented, but the device structure becomes more complex
Solution Approach 1:
The blocking parts are integrated with the support member structure, combining the shielding function with the existing structural framework. This merging reduces the number of separate components and simplifies the overall device structure.
Solution Approach 2:
The blocking parts serve multiple functions: they shield the ground member from cleaning gases, provide structural support, and facilitate easy installation through the fixing members. This multi-functionality reduces the need for additional specialized components.
3Reliability
If the ground member is protected by blocking parts, then the cleaning gas is directed through outer peripheral surfaces, but the cleaning efficiency may be reduced
Solution Approach 1:
The blocking parts are positioned specifically at locations where the ground member is most vulnerable to cleaning gas corrosion, rather than providing complete enclosure. This local protection approach maintains cleaning efficiency in non-critical areas while protecting sensitive components.
Solution Approach 2:
The blocking parts provide partial shielding rather than complete isolation of the ground member. This partial action is sufficient to prevent corrosion while allowing cleaning gases to access most surfaces, maintaining overall cleaning effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents corrosion and breakage of the ground member during cleaning processes, ensuring the deposition device's reliability and preventing defects caused by gas exposure.
Implementation Method 1
The first blocking part shields the first end portion of the ground member from view... The first blocking part shields the first end portion of the ground member from view, preventing cleaning gases from directly contacting the ground member
Implementation Method 2
a suction member configured to suck the cleaning gas through the through-opening formed in the lower portion of the chamber
Data Source
AI summary
A deposition device includes a chamber, a support member, a ground member, and a first fixing member. The chamber includes a lower portion and a side wall. The support member is located in a space defined by the lower portion and the side wall of the chamber, and includes a side surface. The ground member is disposed between the support member and the lower portion of the chamber. The first fixing member includes a first body and a first blocking part. The first body is located under a first end portion of the ground member, and includes a side surface. The first blocking part is located on the side surface of the first body and the side surface of the support member, and extends along the side surface of the support member. The first blocking part shields the first end portion of the ground member from view.