Deposition Heater Shielding Against Particle Short Circuits
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Solution Overview
Problem
Existing deposition apparatuses face issues with short circuits caused by minute particles of deposition material stacking on heater components, leading to inefficiencies and potential damage.
Innovation Solution
The deposition apparatus incorporates a shielding cover and shielding tube made of high-purity boron nitride, along with a coupling member and fixing frame with high rigidity, to prevent particle accumulation and ensure a strong fastening force, thereby preventing heater short circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a heater module is used to heat the deposition material, then the deposition process can be performed, but minute particles of deposition material may stack on the heater causing short circuits
Solution Approach 1:
The patent introduces a coupling member as an intermediary component between the heater module and the deposition source. This coupling member includes a shielding tube that prevents deposition material particles from directly contacting the heater, thereby eliminating the short circuit risk while maintaining the heater's heating function for the deposition process
Solution Approach 2:
The heater module is segmented into separate functional components: the heater element for heating, the coupling member for connection and shielding, and the deposition source for material supply. This segmentation allows the heater to be protected from particle contamination while maintaining its heating capability
2Ease of manufacture
If a coupling member is used to connect components, then assembly is achieved, but the fastening force may be insufficient
Solution Approach 1:
The coupling member is constructed using composite material structures, combining different materials with complementary properties. The shielding tube is made of boron nitride (95% purity or higher) which provides both mechanical strength for fastening and electrical insulation to prevent short circuits, thereby simultaneously achieving strong assembly and reliability
3Reliability
If high-purity boron nitride is used for the shielding tube, then particle accumulation is prevented, but manufacturing cost increases
Solution Approach 1:
The high-purity boron nitride material is applied locally only to the shielding tube portion that directly contacts deposition material, rather than the entire heater module. This localized application of high-purity material provides adequate protection against particle accumulation and short circuits while minimizing the overall manufacturing cost
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents short circuits and ensures a high fastening force, enhancing the reliability and efficiency of the deposition process by shielding the heater components from deposition material particles.
Implementation Method 1
a heater module disposed adjacent to an outer portion of the accommodation module to provide a heat to the deposition material
Implementation Method 2
the second heater cover including an insulating material, a coupling member inserted into the first through hole, the second through hole, and the fastening hole, and a shielding cover covering a first end of the coupling member adjacent to the accommodation module and including an insulating material
Data Source
AI summary
A deposition apparatus includes a chamber providing an inner space and a deposition source including an accommodation module accommodating a deposition material and a heater module providing heat to the deposition material. The deposition source is accommodated in the inner space to provide the deposition material. The heater module includes a first heater cover including a surface facing the accommodation module, including an insulating material, and provided with a first through hole, a second heater cover including an insulating material and provided with a second through hole, a heater disposed between the first and second heater covers, a fixing frame coupled with the second heater cover to fix the second heater cover and provided with a fastening hole, a coupling member inserted into the first and second through holes and the fastening hole, and a shielding cover covering an end of the coupling member and including an insulating material.