Deposition Line Parameter Adjustment from Outlet Quality Measurements
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Solution Overview
Problem
Existing methods for adjusting operating parameters of deposition lines for fabricating transparent substrates with thin layers are lengthy, tedious, and costly, particularly when dealing with large deposition lines, and often require complex physical modeling or expensive in-situ instrumentation.
Innovation Solution
A method using a simplified mathematical model to automatically determine adjustment values for operating parameters based on quality measurements taken at the outlet of the deposition line, allowing for precise adjustment of thin layer stacks without the need for extensive physical modeling or in-situ instrumentation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If physical modeling or in-situ instrumentation is used to adjust operating parameters, then manufacturing precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent uses a simplified mathematical model that copies the essential relationships between operating parameters and layer thickness without requiring complex physical modeling. This mathematical representation captures the key dependencies while avoiding the complexity of full physical models, enabling parameter adjustment through calculations rather than expensive instrumentation.
Solution Approach 2:
The invention changes the approach from using complex physical models to using a simplified mathematical model with adjustable parameters. By modifying the complexity level of the modeling approach while maintaining its predictive capability, the system achieves the needed precision without the burden of complex physical modeling or specialized instrumentation.
2Manufacturing precision
If layer-by-layer adjustment is performed, then manufacturing precision is improved, but loss of time increases
Solution Approach 1:
The patent performs preliminary calculations using the mathematical model to determine all necessary operating parameter adjustments before actual deposition begins. By pre-calculating the optimal parameters based on the desired stack specifications and current measurements, the system avoids time-consuming iterative adjustments during production, significantly reducing the overall adjustment time while maintaining precision.
Solution Approach 2:
The system implements feedback by measuring the actual thickness of deposited layers and using these measurements to update the mathematical model. This feedback loop allows the system to learn from actual deposition results and automatically adjust parameters for subsequent layers, reducing the need for manual layer-by-layer optimization and accelerating the adjustment process.
3Productivity
If multiple operating parameters are adjusted simultaneously, then productivity is improved, but manufacturing precision may deteriorate
Solution Approach 1:
The patent segments the adjustment process into two distinct phases: a calculation phase where the mathematical model determines all necessary parameter changes, and an execution phase where these pre-determined parameters are applied. This segmentation allows multiple parameters to be adjusted simultaneously during deposition without compromising precision, because the interdependencies between parameters have already been resolved in the calculation phase.
Solution Approach 2:
By performing preliminary calculations to determine the optimal set of operating parameters before deposition begins, the system resolves all interdependencies between multiple parameters in advance. This preliminary action enables simultaneous adjustment of multiple parameters during the deposition process without sacrificing precision, as the mathematical model has already accounted for the interactions between all parameters.
Data Source
AI summary
An adjustment-determining method includes obtaining a mathematical model relating an operating parameter of the deposition line to a quality function defined from a quality measurement of a stack of thin layers deposited by the deposition line on a transparent substrate; obtaining a value of the quality function from a value of the quality measurement measured at the outlet of the deposition line on a stack of thin layers deposited by the deposition line on a substrate while the deposition line was set so that an operating parameter had a current value; and automatically determining by the mathematical model an adjustment value for the current value of the operating parameter serving to reduce a difference that exists between the value obtained for the quality function and a target value selected for the quality function for the stack of thin layers.