Deposition Apparatus Magnet Alignment for Mask Stability
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Solution Overview
Problem
In the manufacturing of organic light emitting diode (OLED) displays, the repulsive force between magnet units and masks can cause the mask to be suction-held inadequately to the substrate, leading to substrate detachment and deposition defects due to the alignment of magnet units parallel to the mask direction.
Innovation Solution
A deposition apparatus is designed with upper and lower driving units that move magnet units to intersect the direction of the masks, preventing repulsive forces and ensuring the mask remains flat and securely attached to the substrate, thereby reducing deposition defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If magnet units are arranged parallel to the mask direction, then the mask can be easily positioned, but repulsive force occurs between the magnet units and the mask causing inadequate suction-holding
Solution Approach 1:
The patent employs movable magnet units that can dynamically adjust their positions along the mask surface. The magnet units are mounted on movable stages that allow them to be repositioned from a parallel arrangement (easy positioning) to a perpendicular arrangement (stable suction-holding), thus resolving the contradiction between ease of operation and reliability
Solution Approach 2:
The patent changes the spatial parameter of magnet unit arrangement from parallel to perpendicular relative to the mask direction. This parameter change eliminates the repulsive force issue while maintaining positioning capability, as the perpendicular arrangement allows magnetic attraction without the directional repulsion that occurs in parallel alignment
2Device complexity
If magnet units are fixed in position, then the structure is simple, but the mask may not remain flat during deposition
Solution Approach 1:
The patent introduces movable magnet units that can adjust their positions to maintain optimal contact with the mask surface during deposition. This dynamic capability ensures the mask remains flat and properly positioned without requiring a complex fixed structure, balancing simplicity with stability
3Manufacturing precision
If the mask is made very thin to achieve fine patterns, then the resolution is improved, but the mask cannot stay flat due to lack of structural rigidity
Solution Approach 1:
The patent uses magnet units that generate magnetic attraction forces to counteract the gravitational and deformation forces acting on the thin mask. This magnetic counterforce keeps the thin mask flat and stable during deposition, enabling high-resolution patterning without sacrificing structural stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively prevents substrate detachment and reduces defects in the deposition process by aligning magnet units perpendicular to the mask direction, ensuring a stable deposition environment for OLED manufacturing.
Implementation Method 1
magnet units that suction-holds the mask flat to the substrate
Implementation Method 2
upper driving units that move the magnet units in a first direction, and lower driving units that move the magnet units in a second direction
Data Source
AI summary
A deposition apparatus includes a mask frame, a plurality of masks disposed on the mask frame, a first plate disposed on the masks, a second plate disposed on the first plate, a plurality of upper driving units disposed between the first plate and the second plate, a plurality of lower driving units disposed between the upper driving units and the first plate, and a plurality of magnet units respectively disposed in magnet unit accommodation spaces. The upper driving units extend in a first direction and are arranged in a second direction intersecting the first direction, and the lower driving units extend in the second direction and are arranged in the first direction.