Deposition Mask Structure for Burr-Free OLED Pixel Patterning

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Solution Overview

Problem

In the manufacturing of organic electroluminescence (EL) display apparatus, deposition masks with resin films experience issues such as burr formation and temperature increases due to radiant heat, leading to decreased display quality and precision in pixel size, especially with finer patterns required for high-definition images.

Innovation Solution

A deposition mask is manufactured using a resin film with a pattern of opening portions formed by irradiating the front surface with laser light and utilizing a reflective film on the back surface to absorb and reflect the laser light, ensuring complete removal of resin material without burrs and enhancing heat dissipation through a high-heat-radiation film.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If laser light is used to form patterns in resin film, then manufacturing precision is improved, but burr formation occurs causing quality degradation

Engineering Contradiction:
Improvepattern formation precisionVSAvoidburr formation
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

A liquid layer (intermediary substance) is introduced between the laser light source and the resin film. This liquid layer absorbs and attenuates the laser light energy, preventing excessive heating and burr formation at the resin film surface while still allowing sufficient energy transmission to form the desired pattern. The liquid layer acts as a mediator that controls the energy interaction between the laser and resin.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention converts the harmful effect of laser light (causing burr formation through excessive heating) into a beneficial effect. By controlling the laser light intensity and using the liquid layer to modulate energy absorption, the process transforms potential damage into precise pattern formation without burrs. The same laser light that could cause harm is instead used to create clean, precise openings.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Temperature

If radiant heat from vapor deposition source is absorbed, then temperature increases, but heat dissipation is needed to maintain pixel size precision

Engineering Contradiction:
Improvedeposition mask temperatureVSAvoidpixel size precision
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

The deposition mask is designed with differentiated thermal properties in different regions. The resin film portion has low thermal conductivity to maintain temperature stability at the pattern formation area, while the metal support layer provides structural stability and heat dissipation pathways. This local differentiation of thermal properties allows the mask to resist temperature increases in critical areas while maintaining overall thermal management.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The deposition mask uses a composite structure combining resin film and metal support layer. The resin film provides temperature stability and laser light transmission properties, while the metal support layer provides mechanical strength and heat dissipation. This composite material approach allows simultaneous optimization of thermal resistance and heat dissipation capabilities to maintain pixel size precision.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for precise, burr-less formation of opening portions in the deposition mask, improving display quality by preventing resin material from attaching as burrs and effectively dissipating heat, thus maintaining the accuracy and size of pixels in organic EL display apparatus.

Implementation Method 1

providing a reflective film on another side of the resin film, the reflective film being adapted to reflect the light having the wavelength of the laser light emitted from the light irradiation source

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

disposing a light irradiation source on one side of the resin film, the light irradiation source being adapted to emit laser light for forming the pattern of the opening portions

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 3

enhancing heat dissipation through a high-heat-radiation film

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS11826855B2Deposition mask, mask member for deposition mask, method of manufacturing deposition mask, and method of manufacturing organic EL display apparatus
Publication Date: 2023.11.28 HON HAI PRECISION INDUSTRY CO LTD
  • US11826855B2 patent drawing
  • US11826855B2 patent drawing
  • US11826855B2 patent drawing

AI summary

A deposition mask includes a resin film defining a plurality of opening portions. Each opening portions extends through the resin film. The resin film includes a first surface and a second surface opposite to the first surface. The second surface is a surface faced to a vapor deposition source during vapor deposition. The resin film defines dents comprising laser marks on the first surface. A mask member for a deposition mask is also provided.