Deposition Mask Coating for Groove and Protrusion Defects
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Solution Overview
Problem
Existing deposition masks suffer from precision and reliability issues due to defects such as grooves and protrusions, leading to inaccurate deposition and reduced quality of functional layers in display devices.
Innovation Solution
A mask design with a coating layer covering grooves and protrusions on the protruding portions, made of materials like iron-nickel alloy, and having a thickness of up to 30 micrometers, which enhances deposition precision and reliability by preventing deposition material from seeping into non-target areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask is used for deposition without a coating layer, then the mask structure is simple and easy to manufacture, but deposition precision and reliability deteriorate due to defects like grooves and protrusions causing material seepage
Solution Approach 1:
A coating layer is introduced as an intermediary between the mask substrate and the deposition material. This coating layer fills grooves and covers protrusions on the mask surface, preventing deposition material from seeping into defects. The coating layer acts as a mediator that eliminates the harmful effects of surface defects while maintaining the original mask structure, thereby improving deposition precision without requiring changes to the fundamental mask design
Solution Approach 2:
The coating layer is applied to the mask surface before the deposition process occurs. This preliminary action of coating the mask prepares the surface by filling defects and creating a smooth, uniform surface that prevents material seepage during deposition. By performing this surface preparation in advance, the mask is ready for high-precision deposition without requiring complex real-time adjustments
2Ease of manufacture
If the mask has grooves and protrusions on the protruding portion, then the mask can be manufactured with standard processes, but deposition reliability decreases due to material seeping into non-target areas
Solution Approach 1:
The coating layer transforms the harmful effect of surface defects into a beneficial outcome. Instead of trying to eliminate grooves and protrusions through complex manufacturing processes, the coating layer is applied to fill these defects and create a uniform surface. The原本 harmful surface irregularities are converted into opportunities for the coating layer to demonstrate its function of preventing material seepage, thereby improving deposition reliability while maintaining manufacturing simplicity
3Manufacturing precision
If a coating layer is added to cover defects on the mask, then deposition precision and reliability improve, but the manufacturing process becomes more complex
Solution Approach 1:
The solution changes the surface parameters of the mask by adding a coating layer with specific properties (thickness, material composition, surface smoothness). Instead of attempting to achieve atomic-level precision in the mask substrate manufacturing, the coating layer provides a new surface with controlled parameters that prevent material seepage. This parameter change approach allows standard manufacturing processes to be used for the substrate while achieving high deposition precision through the coating
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coating layer improves deposition precision and reliability by minimizing errors and deviations, ensuring accurate deposition of materials on the substrate, thereby enhancing the quality of display devices.
Implementation Method 1
The deposition apparatus heats a deposition material in a chamber with high vacuum to evaporate the deposition material, and thus, the evaporated deposition material is condensed on a surface of a substrate to form the thin layer
Data Source
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AI summary
A mask includes a protruding portion including a deposition hole formed therethrough and including, an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface of the protruding portion, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.