Deposition Mask Seating With Electrostatic Chuck Alignment
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Solution Overview
Problem
Existing deposition apparatuses face challenges in easily seating a deposition mask on a substrate during the manufacturing of OLED display devices, which is crucial for forming light emitting layers.
Innovation Solution
A deposition apparatus comprising a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck, where the deposition mask includes a polymer mask with a conductive layer, and substrates are grounded with swapped AC power to generate electrostatic forces for precise mask seating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask is placed on a substrate during OLED manufacturing, then organic material can be deposited through opening parts to form light emitting layers, but the mask seating process becomes complex and difficult
Solution Approach 1:
The patent replaces mechanical mask seating methods with electrostatic attraction. By applying voltage to the electrostatic chuck, electrostatic forces automatically hold and position the mask on the substrate, eliminating complex mechanical alignment and seating mechanisms while achieving precise positioning
Solution Approach 2:
The patent changes the physical state and electrical parameters of the electrostatic chuck by applying different voltages (e.g., 0V, +100V, -100V) to control the electrostatic attraction between the mask and substrate. This allows dynamic control of mask seating and removal without mechanical intervention
2Measurement precision
If AC power is applied to the deposition mask to generate electrostatic force, then the mask can be seated precisely on the substrate, but the system complexity increases
Solution Approach 1:
The electrostatic chuck serves multiple functions: it holds the substrate, positions the mask, and enables precise alignment through voltage control. This multi-functionality reduces the need for separate positioning mechanisms and simplifies the overall system despite the electrical control requirements
Solution Approach 2:
The electrostatic attraction force automatically pulls the mask into precise alignment with the substrate when voltage is applied. The system self-adjusts and self-positions without requiring external mechanical alignment tools or complex positioning mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy and precise seating of the deposition mask on the substrate, ensuring accurate deposition of organic materials for light emitting layers, thereby improving the manufacturing process of OLED display devices.
Implementation Method 1
An electrostatic force is generated in the electrostatic chuck to dispose a substrate on a surface of the electrostatic chuck
Implementation Method 2
The substrate is grounded and AC power is applied to the deposition mask to dispose the deposition mask to be close to the substrate
Data Source
AI summary
An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.