Deposition Mask With Thickened Peripheral Part For Welding Stability
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Solution Overview
Problem
Conventional masks used in deposition processes for thin film devices are prone to bursting and thermal deformation when welded to mask frames, leading to precision issues and shadow effects due to their thin thickness, which complicates the formation of fine patterns and affects the accuracy of film deposition.
Innovation Solution
A mask design with a peripheral part thicker than the deposition part, featuring an extending part at the boundary between the deposition and peripheral parts, and a welding line on the peripheral part to prevent thermal deformation and enhance strength, allowing for precise welding without bursting, thereby minimizing shadow effects and maintaining deposition pattern accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a thin mask (10 μm) is used for deposition, then the mask can be flexibly manufactured and applied, but the mask may burst and undergo thermal deformation during welding to the mask frame
Solution Approach 1:
The mask is designed with different thicknesses in different regions: the peripheral part has a first thickness while the deposition part has a second thickness (smaller than the first). This local quality differentiation allows the peripheral part to provide structural strength for reliable welding, while the deposition part maintains thinness for flexibility and precise pattern formation.
2Manufacturing precision
If a thin mask is used for deposition, then the mask can be precisely formed, but thermal deformation occurs during laser welding causing deposition pattern distortion
Solution Approach 1:
The mask is designed with different thicknesses in different regions: the peripheral part has a first thickness while the deposition part has a second thickness (smaller than the first). This local quality differentiation allows the peripheral part to provide structural strength for reliable welding, while the deposition part maintains thinness for flexibility and precise pattern formation.
3Ease of manufacture
If a thin mask is used for deposition, then the mask can be easily manufactured, but a gap forms between the mask and substrate causing shadow effects
Solution Approach 1:
The mask is designed with different thicknesses in different regions: the peripheral part has a first thickness while the deposition part has a second thickness (smaller than the first). This local quality differentiation allows the peripheral part to provide structural strength for reliable welding, while the deposition part maintains thinness for flexibility and precise pattern formation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The enhanced mask design prevents thermal deformation and bursting during welding, ensuring precise deposition patterns and minimizing shadow effects, thus improving the accuracy and reliability of film deposition processes.
Implementation Method 1
the region of the mask to which a laser is applied may be thermally deformed when the mask and the mask frame are welded together using the laser
Implementation Method 2
welding a mask frame to one surface of the mask material formed on the first patterned electrode
Data Source
AI summary
A mask for deposition and a manufacturing method thereof are disclosed in aspects of the present disclosure. The disclosed mask for deposition and the manufacturing method thereof include: a deposition part including a plurality of deposition patterns; a peripheral part configured to surround the outside of the deposition part; and at least one extending part provided at the boundary between the deposition part and the peripheral part, wherein the extending part has a thickness smaller than that of the peripheral part. Accordingly, it is possible to enhance the strength of the boundary portion between the peripheral part and the deposition part of the mask for deposition.