Deposition Mask Metal Plate Inspection Using Pit Volume Density
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional methods for inspecting metal plates for deposition masks rely on arithmetic average roughness (Ra) and maximum height (Ry), which lack correlation with size precision of through-holes, leading to overly severe threshold settings and reduced yield due to inaccurate quality determination.
Innovation Solution
A manufacturing method for metal plates that involves calculating a corrected pit volume density by dividing the sum of pit volumes by the surface area, using a laser microscope to measure pit depths, and setting thresholds to ensure precise through-hole formation, thereby improving the accuracy of metal plate quality assessment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional inspection methods using arithmetic average roughness (Ra) and maximum height (Ry) are used, then the inspection process is simple, but the quality determination is inaccurate leading to reduced yield
Solution Approach 1:
The invention changes the inspection parameter from conventional Ra and Ry values to corrected pit volume density. This parameter change provides a more accurate correlation with through-hole size precision, enabling better quality determination and reducing unnecessary rejection of suitable metal plates, thereby improving both measurement accuracy and yield.
Solution Approach 2:
The invention replaces the conventional mechanical/optical roughness measurement system with a laser microscope-based pit depth measurement system. This substitution enables more precise measurement of pit characteristics and calculation of corrected pit volume density, leading to improved quality assessment accuracy.
2Manufacturing precision
If severe threshold settings are applied to ensure through-hole precision, then the size precision of through-holes is maintained, but the yield of suitable metal plates is reduced
Solution Approach 1:
The invention introduces a new inspection parameter (corrected pit volume density) that has a more direct correlation with through-hole size precision. This allows for more reasonable and accurate threshold settings that maintain manufacturing precision without requiring overly severe thresholds, thereby improving yield.
Solution Approach 2:
The invention establishes a feedback mechanism where the corrected pit volume density is calculated and compared against thresholds to determine suitability for through-hole formation. This feedback loop enables optimized threshold settings that balance precision requirements with yield maximization.
3Manufacturing precision
If conventional roughness parameters are used for inspection, then the inspection method is simple, but there is no correlation with size precision of through-holes
Solution Approach 1:
The invention replaces simple roughness measurement with laser microscope-based pit depth measurement and corrected pit volume density calculation. While this increases inspection complexity, it establishes a direct correlation with through-hole size precision, enabling accurate prediction and control of manufacturing precision.
Solution Approach 2:
The invention changes from measuring general surface roughness (Ra, Ry) to measuring specific pit characteristics (depth, volume density) that directly correlate with through-hole formation precision. This parameter change creates a meaningful connection between inspection results and manufacturing outcomes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for more accurate prediction of size precision in through-holes, reducing the need for severe threshold settings and increasing the yield of suitable metal plates for deposition masks.
Implementation Method 1
using a laser microscope to measure pit depths
Data Source
AI summary
The metal plate includes a plurality of pits located on the surface of the metal plate. The manufacturing method for a metal plate for use in manufacturing of a deposition mask includes an inspection step of determining a quality of the metal plate based on a sum of volumes of a plurality of pits located at a portion of the surface of the metal plate.