Deposition Mask with Protective Layer for Resin Film Peeling

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Solution Overview

Problem

Existing deposition masks, particularly those with fine metal masks, face challenges in scaling up while maintaining precision and preventing damage such as peeling to non-resin layers during the deposition process, especially when using resin films that are lighter and easier to thin.

Innovation Solution

A deposition mask design incorporating a resin film with first holes, a non-resin layer with corresponding second holes, and a protective layer with third holes, where the protective layer covers the top and side surfaces of the non-resin layer, including fluorine-based materials to prevent peeling and ensure precise pattern formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Weight of moving object

If a resin film is used instead of fine metal mask, then the mask becomes lighter and easier to thin, but the non-resin layer is prone to peeling damage during deposition

Engineering Contradiction:

Improvemask weightVSAvoidnon-resin layer adhesion

Core Design Contradiction:

Weight of moving objectVSReliability

Solution Approach 1:

The invention uses a composite structure combining resin film, non-resin layer, and protective layer. The protective layer is formed of fluorine-based organic material, fluorine-based inorganic material, or fluorine-based metal material, creating a composite structure that prevents peeling of the non-resin layer while maintaining the lightweight advantage of resin films.

Inventive Principle:

Principle #40Composite materials

2Reliability

If the protective layer covers the side surface of second holes, then peeling damage is minimized, but the device structure becomes more complex

Engineering Contradiction:

Improvenon-resin layer adhesionVSAvoidmask structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The protective layer is segmented into two distinct portions: a first portion disposed on the top surface of the non-resin layer and a second portion covering the side surface of the second holes. This segmentation allows the protective layer to provide comprehensive protection against peeling damage while maintaining a manageable and manufacturable structure.

Inventive Principle:

Principle #1Segmentation

3Manufacturing precision

If resolution of opening pattern is increased, then deposition precision is improved, but manufacturing difficulty increases

Engineering Contradiction:

Improveopening pattern resolutionVSAvoidmask fabrication

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The invention uses thin resin films that can be manufactured with high precision opening patterns. The resin film substrate allows for precise patterning while remaining flexible and easier to manufacture compared to traditional fine metal masks, resolving the contradiction between high resolution and manufacturing ease.

Inventive Principle:

Principle #30Flexible shells and thin films

Data Source

PatentUS20250010323A1Mask for deposition

Publication Date: 2025.01.09 SAMSUNG DISPLAY CO LTD

AI summary

A deposition mask including a resin film including first holes, a non-resin layer disposed on the resin film and including second holes corresponding to the first holes, and a protective layer disposed on the non-resin layer and including third holes corresponding to the first holes, wherein the protective layer includes a first portion disposed on a top surface of the non-resin layer, and a second portion covering a side surface of the second holes of the non-resin layer.