Deposition Mask with Sensor Grooves for Display Emission Layers

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Solution Overview

Problem

The frequency of defects in the manufacturing process of display apparatuses is high, particularly due to issues with the deposition of emission layers, which affects the quality and reliability of the final product.

Innovation Solution

A mask with a specific design featuring a sensor area with grooves and a main deposition area with through-holes is used to reduce defects, where the grooves on the sensor area and through-holes on the main area are strategically arranged to ensure uniform stress and prevent sagging, and the method involves forming these features in a way that minimizes the occurrence of defects during the manufacturing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional mask design is used for depositing emission layers, then the manufacturing process can proceed, but the defect rate is high due to non-uniform stress distribution and sagging

Engineering Contradiction:
Improvedefect rateVSAvoiduniformity of stress distribution
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The mask is divided into distinct functional areas: a sensor area with grooves for detecting sagging, and a main deposition area with through-holes for material deposition. This segmentation allows independent optimization of each area's function, enabling the sensor area to monitor stress uniformity while the main area performs deposition, thereby reducing defects caused by non-uniform stress distribution

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Grooves are pre-formed in the sensor area of the mask before the deposition process begins. These grooves serve as preliminary stress relief structures that prevent sagging during the deposition process. By preparing these stress management features in advance, the mask maintains structural integrity throughout deposition, reducing defects without requiring real-time adjustments

Inventive Principle:
Principle #10Preliminary action

2Ease of manufacture

If the mask structure is simplified, then manufacturing becomes easier, but stress distribution becomes non-uniform causing defects

Engineering Contradiction:
Improvemask fabrication simplicityVSAvoiddefect rate
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

Different regions of the mask are given different structural qualities: the sensor area contains grooves for stress management while the main deposition area contains through-holes for material passage. This local differentiation allows each area to perform its specific function optimally - the grooves prevent sagging in the sensor region while through-holes enable deposition in the main area - thereby reducing defects without requiring complex overall structure

Inventive Principle:
Principle #3Local quality

3Reliability

If grooves are added to the sensor area, then stress distribution improves and defects reduce, but device complexity increases

Engineering Contradiction:
Improvedefect rateVSAvoidmask structural complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The mask is segmented into a sensor area with grooves and a main deposition area with through-holes. This segmentation confines the complexity to specific localized regions rather than requiring complex structures throughout the entire mask. The grooves are only in the sensor area where they are needed for stress management, while the main deposition area maintains a simpler through-hole structure, thereby limiting overall device complexity while still achieving defect reduction

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of this mask design significantly reduces the defect rate in the display apparatus manufacturing process by ensuring uniform stress distribution and preventing defects during the deposition of emission layers, leading to higher quality and reliable display apparatuses.

Implementation Method 1

the grooves on the sensor area and through-holes on the main area are strategically arranged to ensure uniform stress and prevent sagging

Methodology Applied
Scientific EffectStress distribution:

Implementation Method 2

a mask for depositing an emission layer, in which a defect rate in a display apparatus manufacturing process may be reduced

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Data Source

PatentUS20230374646A1Mask for depositing emission layer, method of manufacturing the mask, and display apparatus manufactured using the mask
Publication Date: 2023.11.23 SAMSUNG DISPLAY CO LTD
  • US20230374646A1 patent drawing
  • US20230374646A1 patent drawing
  • US20230374646A1 patent drawing

AI summary

In a mask for depositing an emission layer, the mask includes: a plurality of deposition areas corresponding to a plurality of display panels, wherein each of the plurality of deposition areas includes: a sensor area in which a plurality of grooves are arranged at regular intervals; and a main deposition area outside the sensor area to surround the sensor area, the main deposition area including a plurality of through-holes arranged at regular intervals to enable a deposition material to pass therethrough.