Multi-Layer Deposition Mask for Display Panel Shadowing Reduction
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Solution Overview
Problem
Existing deposition masks face challenges in achieving reliable and precise deposition processes due to material limitations and shadowing issues, which affect the accuracy and efficiency of light emitting pattern formation in display panels.
Innovation Solution
A deposition mask assembly is developed with a first mask layer made of polymer material and a second mask layer of conductive material, where the second mask layer is thinner and includes materials like titanium or molybdenum, and an auxiliary layer is used to create openings that allow for precise patterning and improved contact with the target substrate, reducing shadowing and enhancing deposition precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional single-layer mask is used, then the structure is simple, but deposition reliability and precision are insufficient due to material limitations and shadowing issues
Solution Approach 1:
The mask is divided into multiple functional layers: a first mask layer (polymer material, 5-15 μm thick) for structural support and flexibility, and a second mask layer (conductive material, 0.1-1 μm thick) for improved contact and reduced shadowing. This segmentation allows each layer to perform its specific function optimally, resolving the contradiction between reliability and simplicity.
Solution Approach 2:
The mask combines different materials with complementary properties: polymer material provides flexibility and structural integrity, while conductive materials (titanium, molybdenum, or aluminum) provide electrical conductivity and reduced shadowing effects. This composite structure enhances deposition reliability without requiring excessive complexity.
2Manufacturing precision
If the mask layer is thicker, then structural strength is improved, but shadowing increases and deposition precision decreases
Solution Approach 1:
Different regions of the mask have different thicknesses and material compositions optimized for their specific functions. The first mask layer is thicker (5-15 μm) for structural support, while the second mask layer is thinner (0.1-1 μm) to minimize shadowing and improve deposition precision. This local optimization resolves the contradiction between strength and precision.
Solution Approach 2:
The mask structure transitions from a single thick layer to a multi-layer structure with varying thickness parameters. The thinner second mask layer reduces shadowing effects and improves deposition precision, while the thicker first mask layer maintains structural strength. This parameter optimization allows simultaneous achievement of both strength and precision requirements.
3Manufacturing precision
If the mask is positioned closer to the substrate, then shadowing is reduced and deposition accuracy improves, but contact reliability becomes challenging
Solution Approach 1:
The composite mask structure combines flexible polymer material with conductive material layers, enabling the mask to conform closely to the substrate surface while maintaining structural integrity and reliable electrical contact. This resolves the contradiction between achieving close positioning for accuracy and maintaining contact reliability.
Solution Approach 2:
The mask structure is designed to be flexible and adaptable, allowing it to dynamically conform to the substrate surface during the deposition process. This dynamic capability enables close positioning for high patterning accuracy while maintaining reliable contact through the flexible first mask layer and conductive second mask layer.
Data Source
AI summary
A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.