Deposition Mask Stage Layout for Mask Frame Deformation Control
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Solution Overview
Problem
Existing display manufacturing processes face challenges in controlling the deformation of mask frames during deposition processes, which can affect the accuracy and yield of the deposition process.
Innovation Solution
A deposition mask stage with a stage frame, chucks, and support blocks, including permanent magnetic chucks, is used to control the position and shape of the deposition mask, allowing independent adjustment of chucks and support blocks to correct distortions and maintain precise mask alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a mask frame is used to allow the fine metal mask to contact the substrate, then the deposition process can be performed, but the mask frame deforms during the deposition process affecting accuracy
Solution Approach 1:
The mask frame is divided into multiple segments or regions, each supported by independent support blocks. This segmentation allows localized adjustment and compensation of deformations in different areas of the mask frame during the deposition process.
Solution Approach 2:
The support blocks are positioned and adjusted before the deposition process begins to pre-compensate for expected thermal expansion and deformation. This preliminary positioning ensures the mask frame maintains its shape despite subsequent thermal effects during deposition.
2Stability of the object's composition
If the mask frame is rigid to maintain shape, then structural stability is improved, but thermal stress causes deformation during deposition
Solution Approach 1:
Different regions of the mask frame structure are provided with different support characteristics. The support blocks are selectively positioned at critical areas where thermal stress concentration occurs, providing localized compliance while maintaining overall structural stability.
Solution Approach 2:
The support blocks can be adjusted to change the mechanical parameters (position, height, support force) of the mask frame during the deposition process, compensating for thermal stress-induced deformations by dynamically adjusting physical parameters.
3Manufacturing precision
If support blocks are added to control mask frame deformation, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The support blocks are designed to be self-adjusting through thermal expansion and contraction, automatically compensating for mask frame deformation without requiring complex external control systems. The structure serves its own correction function through inherent thermal-mechanical coupling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the accuracy and yield of the deposition process by enabling precise control over the mask frame's shape, ensuring consistent deposition patterns on substrates.
Implementation Method 1
The chucks may include a permanent magnetic chuck
Data Source
AI summary
Disclosed is a deposition mask stage comprising a stage frame, chucks combined with the stage frame, and support blocks on a back side of the stage frame. The chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame. The first and second directions intersect each other. The support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.