Deposition Module Close Contact Mechanism for Leakage Prevention

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Solution Overview

Problem

Existing deposition systems face challenges with deposition material leakage through gaps between the crucible and nozzle portions during the deposition process, and the crucible and nozzle portions are difficult to separate after the process is completed.

Innovation Solution

A deposition module with a close contact portion that brings the crucible and nozzle portions into close contact, using a heater that can switch between two states to control the heating value, and incorporating a close contact frame with pressing portions to ensure proper contact and prevent leakage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the crucible portion and nozzle portion are separated to enable easy separation after deposition, then the ease of operation is improved, but deposition material may leak through the gap between them during the deposition process

Engineering Contradiction:
Improveease of separationVSAvoiddeposition material leakage
Core Design Contradiction:
Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The close contact portion is designed to be movable between a first position (spaced apart from the spraying portion) and a second position (pressing the spraying portion). This dynamic positioning allows the system to transition between a sealed state during deposition to prevent leakage and an open state after deposition to enable easy separation of the crucible and nozzle portions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The close contact portion acts as an intermediary component between the crucible portion and nozzle portion. It provides a pressing surface that can be positioned to either seal the gap between the crucible and nozzle (preventing material leakage) or be retracted to allow easy separation, thus mediating between the conflicting requirements of sealing and separability.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the heater is always in the second state (high heating value) to ensure proper heating, then the reliability is improved, but energy consumption increases

Engineering Contradiction:
Improveheating reliabilityVSAvoidenergy consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The heater operates in periodic cycles, switching between the first state (low heating value) and the second state (high heating value). The heater is activated in the second state only when needed for specific heating tasks, such as melting deposition material or maintaining temperature during deposition, and switches to the first state during idle periods or when lower temperature is sufficient, thereby reducing overall energy consumption while maintaining reliability when required.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents deposition material leakage and simplifies the separation of the crucible and nozzle portions after the deposition process, enhancing the durability and efficiency of the deposition module.

Implementation Method 1

The heater is accommodated in the internal space so as to heat the nozzle portion and is configured to be switchable between a first state and a second state, the second state having a heating value higher than a heating value of the first state

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 2

The close contact portion is accommodated in the internal space so as to bring the crucible portion and the nozzle portion into close contact with each other, and the close contact portion includes a pressing surface spaced apart from the spraying portion in the first state and configured to press on the spraying portion in the second state

Methodology Applied
Scientific EffectMechanical contact: Mechanical Force

Implementation Method 3

The nozzle portion connected to the crucible portion and configured to spray the deposition material stored in the storage space

Methodology Applied
Scientific EffectSpraying: Spray

Data Source

PatentUS20250051905A1Deposition module and display device manufacturing apparatus including the same
Publication Date: 2025.02.13 SAMSUNG DISPLAY CO LTD
  • US20250051905A1 patent drawing
  • US20250051905A1 patent drawing
  • US20250051905A1 patent drawing

AI summary

A display device manufacturing apparatus includes a mask assembly, and a deposition module configured to supply a deposition material toward the mask assembly. The deposition module includes a deposition frame, a spraying portion, a heater, and a close contact portion. The deposition frame has an internal space. The spraying portion includes a crucible portion and a nozzle portion. The heater heats the nozzle portion and is configured to be switchable between a first state and a second state with a higher heating value than the first state. The close contact portion brings the crucible portion and the nozzle portion into close contact with each other, and the close contact portion includes a pressing surface spaced apart from the spraying portion in the first state and configured to press on the spraying portion in the second state.