Deposition Shutter Control for Display Substrate Precision

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Solution Overview

Problem

The existing manufacturing processes for display apparatuses face challenges in accurately controlling the deposition of multiple materials onto substrates, which affects the performance and resolution of the final display device, particularly due to variations in deposition order, concentration, and mixing ratios of materials.

Innovation Solution

The proposed solution involves an apparatus with a chamber, deposition source, mask assembly, and shutter portion, where the deposition source includes multiple crucibles that supply at least two deposition materials, and a shutter or cut-off portion controls the amount of material supplied, allowing for precise deposition on perpendicular substrates, enabling various orders and concentrations of deposition materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If multiple deposition materials are supplied to substrates using conventional methods, then the manufacturing process can produce display apparatus, but the deposition order, concentration, and mixing ratios cannot be accurately controlled

Engineering Contradiction:
Improvedeposition control precisionVSAvoiddeposition system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The deposition source is segmented into multiple crucibles (first crucible, second crucible, etc.), each capable of supplying different deposition materials independently. This segmentation allows precise control over the deposition order and mixing ratios by selectively activating specific crucibles, directly resolving the contradiction between deposition precision and system complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The shutter portion is designed to be movable, enabling dynamic control of material supply timing and duration. By adjusting the shutter position and opening/closing sequences, the system can precisely control deposition order and concentration without requiring complex fixed mechanical structures, thus improving deposition precision while managing system complexity.

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If deposition materials are supplied without precise control mechanisms, then the manufacturing process is simpler, but the resolution and performance of the display apparatus deteriorate

Engineering Contradiction:
Improvematerial deposition precisionVSAvoiddeposition process simplicity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The shutter portion acts as an intermediary component between the crucibles and substrates, mediating the flow of deposition materials. This intermediary mechanism enables precise control of material supply timing and concentration without significantly complicating the overall manufacturing process, as the shutter serves as a simple yet effective control element that can be integrated into existing deposition systems.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If the deposition source supplies multiple materials simultaneously, then the productivity increases, but the control over deposition order and concentration becomes difficult

Engineering Contradiction:
Improvedeposition efficiencyVSAvoiddeposition material control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The system employs periodic action through the movable shutter that opens and closes in specific sequences to control material supply from different crucibles. This periodic control mechanism enables simultaneous supply of multiple materials while maintaining precise control over deposition order and concentration, as the shutter can be programmed to open/close in predetermined sequences, resolving the contradiction between productivity and precision.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the precise deposition of materials, enhancing the resolution and performance of the display apparatus by accurately controlling the deposition process, resulting in high-quality display devices.

Implementation Method 1

a plurality of crucibles configured to move and supply at least two deposition materials to the first display substrate or the second display substrate

Methodology Applied
Scientific EffectVaporization: Evaporation

Data Source

PatentUS20240368750A1Apparatus and method for manufacturing display apparatus
Publication Date: 2024.11.07 SAMSUNG DISPLAY CO LTD
  • US20240368750A1 patent drawing
  • US20240368750A1 patent drawing
  • US20240368750A1 patent drawing

AI summary

An apparatus for manufacturing a display apparatus includes a chamber configured to accommodate a first display substrate and a second display substrate therein, a deposition source positioned in the chamber and comprising a plurality of crucibles configured to move and supply at least two deposition materials to the first display substrate or the second display substrate, a mask assembly arranged between the first display substrate or the second display substrate and the deposition source, and a shutter portion arranged between the mask assembly and the deposition source and configured to control an amount of the at least two deposition materials supplied from the plurality of crucibles.