Deposition Source With Segmented Heaters For Film Thickness
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Solution Overview
Problem
Existing deposition sources face challenges in maintaining consistent film thickness due to temperature fluctuations of the heater, leading to deviations in film thickness, and suffer from thermal expansion stress, which reduces the lifespan of heater modules and increases the risk of contamination and material inefficiency.
Innovation Solution
A deposition source design featuring a crucible with multiple nozzles, a housing with separate upper and lower heater modules, and a power supply system that controls temperature gradients, minimizing temperature differences between nozzles and alleviating thermal expansion stress through a connecting electrode structure, while a controller ensures a constant power supply to the upper heater module.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single heater module is used, then the device complexity is reduced, but the temperature uniformity across nozzles deteriorates leading to inconsistent film thickness
Solution Approach 1:
The heater module is divided into multiple independent heating elements (first heater, second heater, third heater, fourth heater) positioned at different locations around the crucible. Each heating element can be independently controlled to maintain uniform temperature distribution across all nozzles, thereby achieving consistent film thickness without excessive complexity
Solution Approach 2:
Different heating elements are positioned to provide localized heating to specific regions of the crucible and nozzles. The first and second heaters are positioned to heat the crucible from opposite sides, while the third and fourth heaters are positioned to heat the nozzles, ensuring each region receives appropriate thermal energy for uniform deposition
2Productivity
If high temperature is maintained for efficient deposition, then productivity is improved, but thermal expansion stress increases reducing heater module lifespan
Solution Approach 1:
The heating system is segmented into multiple independent heating elements that can be controlled individually. This allows for precise temperature management where each heater can be adjusted to minimize thermal stress while maintaining the overall temperature required for efficient deposition, thereby extending heater module lifespan
Solution Approach 2:
The system enables dynamic adjustment of temperature parameters for different heating elements based on real-time conditions. By optimizing the temperature of each heater independently, the system maintains high deposition efficiency while reducing excessive thermal stress that would otherwise reduce heater module lifespan
3Productivity
If temperature of heater is excessively high, then deposition rate is improved, but film thickness uniformity deteriorates
Solution Approach 1:
The heating system is divided into multiple independently controlled heating elements positioned around the crucible and nozzles. This segmentation allows each heater to be optimized for its specific location, maintaining high overall deposition rate while ensuring uniform temperature distribution across all nozzles for consistent film thickness
Solution Approach 2:
Different heating elements provide localized heating tailored to specific regions. The crucible heaters maintain optimal temperature for high deposition rate, while the nozzle heaters ensure uniform temperature distribution across all nozzles, achieving both high productivity and film thickness uniformity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves consistent film thickness distribution, extends the lifespan of heater modules, prevents contamination, and enhances material efficiency by maintaining a stable temperature and reducing thermal stress.
Implementation Method 1
a lower heater module disposed in an inner space of the housing and surrounding the crucible, an upper heater module disposed on the lower heater module in the inner space of the housing
Implementation Method 2
alleviating thermal expansion stress through a connecting electrode structure
Implementation Method 3
a crucible that accommodates a deposition material... through which the deposition material is emitted
Implementation Method 4
Each of the plurality of thin films may be formed by a vacuum deposition method, an ion plating method, a physical vapor deposition method
Data Source
AI summary
A deposition source includes a crucible, a plurality of nozzles, a housing, a lower heater module, an upper heater module, a first electrode, a second electrode, and a power supply. The crucible accommodates a deposition material. The plurality of nozzles is disposed on the crucible and spaced apart from each other along a first direction. The housing accommodates the crucible and the plurality of nozzles. The lower heater module is disposed in an inner space of the housing to surround the crucible. The upper heater module is disposed on the lower heater module. The first electrode extends in a second direction crossing the first direction and is connected to the lower heater module. The second electrode extends in the second direction. The second electrode is connected to the upper heater module. The power supply is electrically connected to the first electrode and the second electrode.