Deposition Apparatus Tray Rotation via Loop Chain
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Solution Overview
Problem
Existing deposition apparatuses are inadequate for ensuring reliable rotation of multiple trays on their own central axes and reducing unevenness in deposition amounts on three-dimensional workpieces, while maintaining a simple structure to minimize manufacturing and maintenance costs.
Innovation Solution
A deposition apparatus featuring a rotatable dome with loop chains and power transmission shafts, tray holders with internal power transmission shafts and rotating portions, and optional swinging and crank mechanisms to facilitate rotation and swinging of trays, ensuring uniform deposition on complex shapes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple trays are installed on the dome for processing multiple works, then productivity is improved, but reliability of rotation on own central axis deteriorates
Solution Approach 1:
The patent combines the dome rotation function with individual tray rotation functions into a single integrated mechanism. The loop chain system serves both to rotate the dome and to rotate each tray on its own central axis simultaneously, eliminating the need for separate drive mechanisms and improving reliability while maintaining high productivity
2Manufacturing precision
If trays are made to rotate on their own central axis for uniform deposition, then manufacturing precision is improved, but device complexity worsens
Solution Approach 1:
The loop chain mechanism serves multiple functions: it transmits the drive force from the dome rotation to rotate the dome itself, and simultaneously transmits power to each tray holder to rotate individual trays on their own central axes. This multi-functional design achieves uniform deposition across all trays without requiring separate complex mechanisms for each tray
Solution Approach 2:
The loop chain acts as an intermediary mechanism that transfers rotational motion from the dome to each individual tray holder. This intermediary system enables synchronized rotation of multiple trays with a single drive source, achieving uniform deposition while keeping the overall mechanism relatively simple
3Adaptability or versatility
If complex three-dimensional works are processed, then adaptability is improved, but unevenness in deposition amount worsens
Solution Approach 1:
The patent implements dynamic rotation of each tray on its own central axis while the dome rotates. This dynamic movement allows the tray to continuously change its orientation relative to the deposition source, ensuring that all surfaces of complex three-dimensional works are evenly exposed to the deposition flux, thereby achieving uniform deposition across irregular geometries
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves reliable rotation of multiple trays and reduces unevenness in deposition amounts on three-dimensional workpieces by transmitting rotational motion through loop chains and internal power transmission shafts, allowing for precise control of rotation and swinging motions during dome rotation.
Implementation Method 1
the chain-driving sprocket is rotated through the rotation of the dome to drive the loop chain, the first internal power transmission shaft of the tray holder is rotated by motion of the loop chain
Implementation Method 2
a first gear section configured to transform the rotational motion of the dome to rotational motion of the power transmission shaft; a second gear section provided with a chain-driving sprocket and configured to transform the rotational motion of the power transmission shaft to rotational motion of the chain-driving sprocket
Implementation Method 3
A deposition apparatus is used to form anti-reflection films on surfaces of optical elements such as lenses and diffraction gratings
Data Source
AI summary
A deposition apparatus includes a dome rotatable around the central axis; a loop chain surrounding the central axis on the dome; a power transmission shaft transmitting rotational motion of the dome; a first gear section transforming the rotational motion of the dome to rotational motion of the shaft; a second gear section provided with a chain-driving sprocket and configured to transform the rotational motion of the shaft to rotational motion of the sprocket; and a tray holder located beside the loop chain, the tray holder including a first internal power transmission shaft and a rotating portion holding a tray. The sprocket is rotated through the rotation of the dome to drive the loop chain, the first internal power transmission shaft of the tray holder is rotated by motion of the loop chain, and the rotating portion is rotated through rotation of the first internal power transmission shaft.