Deposition Apparatus Uniformity Control via Test Substrate Segmentation
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Solution Overview
Problem
In the manufacturing of organic light emitting diode displays, existing technologies face challenges in uniformly controlling the deposited quantities of multiple sources during the vacuum deposition process, leading to inefficiencies and material loss due to the inability to accurately determine abnormal deposition sources.
Innovation Solution
A depositing apparatus equipped with a plurality of depositing sources, a substrate holder, a depositing source shutter, and a main shutter, which allows for the precise measurement of deposited quantities by using a test substrate with divided areas, enabling the identification of abnormal sources and efficient control of material deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple depositing sources are used to increase deposition efficiency, then productivity is improved, but it becomes difficult to uniformly control the deposited quantities of each source
Solution Approach 1:
The patent divides the substrate surface into multiple distinct areas, with each area corresponding to a specific depositing source. This segmentation allows independent measurement and control of deposited quantities from each source, resolving the uniformity control problem while maintaining high productivity through parallel multi-source deposition.
Solution Approach 2:
The patent implements a feedback mechanism by measuring the deposited quantity in each divided area and comparing it against target values. Based on this feedback, the system adjusts operating parameters of individual depositing sources to achieve uniform deposited quantities across all sources, thereby resolving the control precision issue.
2Productivity
If the deposited quantity is not accurately measured, then the deposition process continues without interruption, but abnormal depositing sources cannot be identified leading to material loss
Solution Approach 1:
The patent performs preliminary measurement of deposited quantities from each source on a test substrate before full-scale production deposition. This preliminary action identifies abnormal depositing sources in advance, allowing them to be corrected or replaced before they cause significant material loss during continuous production, thus resolving the contradiction between continuous operation and material efficiency.
3Measurement precision
If a test substrate is used to measure deposited quantity, then measurement precision is improved, but the complexity of the deposition process increases
Solution Approach 1:
The patent designs the substrate holder and deposition chamber to accommodate both test substrate measurement and production substrate processing using the same hardware infrastructure. The divided substrate serves dual purposes: as a measurement tool for characterizing depositing sources and as a template for guiding production deposition patterns, thereby reducing overall process complexity despite the added measurement capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for uniform control of deposited quantities, reduces material loss by accurately determining abnormal sources, and ensures consistent deposition processes, enhancing the manufacturing efficiency of organic light emitting diode displays.
Implementation Method 1
evaporating or sublimating the organic material by using a depositing source spraying a deposition material
Implementation Method 2
evaporating or sublimating the organic material by using a depositing source spraying a deposition material
Implementation Method 3
a vacuum deposition method is widely used, in which an organic material or metal used as an electrode is deposited in a vacuum environment
Data Source
AI summary
A deposition apparatus uniformly controlling deposited quantities of a plurality of depositing sources by efficiently determining an abnormal depositing source. The deposition apparatus may reduce loss of materials by exactly determining an abnormal depositing source. The deposition apparatus includes: a plurality of depositing sources spraying a deposition material; a substrate holder fixing a substrate to face the depositing source; a depositing source shutter disposed at one side of the depositing source and opening and closing an passage of each depositing source; and a main shutter disposed between the depositing source and the substrate fixed to the substrate holder and depositing a part of the deposition material on the substrate through the main shutter.