Detachable Substrate Brush Pad Structure for Contamination-Free Processing

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Solution Overview

Problem

Existing substrate processing brushes suffer from contamination of the substrate and uneven processing due to manual attachment of the processing pad, adhesive contamination, and high maintenance costs due to non-detachable pads and sweepers.

Innovation Solution

A substrate processing brush design with a detachable processing pad and sweeper, where the pad is partially protruded outside the holder for contact with the substrate, and the sweeper is adjacent but not in contact, allowing for separate replacement and preventing adhesive contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the substrate processing pad and sweeper are attached to the holder by adhesive, then the components are securely fixed, but the substrate is contaminated by adhesive and chemical reaction by-products

Engineering Contradiction:

Improvesecure fixationVSAvoidsubstrate contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The substrate processing pad is divided into two separate portions: a first portion attached to the holder and a second portion that is separable. This segmentation allows the pad to be replaced without replacing the entire assembly, eliminating adhesive contamination while maintaining secure fixation where needed.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The second portion of the substrate processing pad is extracted from the holder structure, allowing it to be separated and replaced independently. This extraction eliminates the need for adhesive in the contact area with the substrate, preventing contamination while maintaining secure fixation of the first portion.

Inventive Principle:

Principle #2Taking out (Extraction)

2Device complexity

If the substrate processing pad is manually connected to the holder, then the assembly is simple, but the horizontality of the pad is poor and processing is non-uniform

Engineering Contradiction:

Improveassembly simplicityVSAvoidpad horizontality

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The pad connection system is segmented into a first portion that provides structural support and attachment to the holder, and a second portion that ensures uniform contact with the substrate. This segmentation allows each portion to be optimized for its specific function, maintaining simplicity while achieving precision.

Inventive Principle:

Principle #1Segmentation

3Duration of action of moving object

If the substrate processing pad is worn away, then processing continues, but the pad cannot be separately replaced and maintenance costs are high

Engineering Contradiction:

Improvepad service lifeVSAvoidpad replaceability

Core Design Contradiction:

Duration of action of moving objectVSEase of repair

Solution Approach 1:

The substrate processing pad is segmented into a first portion that remains attached to the holder and a second portion that can be separately replaced when worn. This segmentation enables easy maintenance by allowing replacement of only the worn second portion, extending the service life of the entire pad assembly while reducing maintenance costs.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The second portion of the pad is designed to be discarded when worn and replaced with a new portion, while the first portion attached to the holder is recovered and reused. This approach reduces maintenance costs by minimizing the need to replace the entire pad assembly.

Inventive Principle:

Principle #34Discarding and recovering

4Reliability

If the sweeper is attached to the holder by adhesive, then the sweeper is securely fixed, but the substrate is contaminated by adhesive

Engineering Contradiction:

Improvesweeper fixationVSAvoidsubstrate contamination

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The sweeper is extracted from the adhesive attachment system and repositioned to be connected to the first portion of the pad rather than directly to the holder. This extraction eliminates adhesive contamination of the substrate while maintaining secure fixation of the sweeper through mechanical connection to the pad structure.

Inventive Principle:

Principle #2Taking out (Extraction)

Data Source

PatentUS20260053262A1Substrate processing brush and substrate processing apparatus comprising the same

Publication Date: 2026.02.26 SYSTEM ENGINEERING MEGA SOLUTION CO LTD

AI summary

A substrate processing brush according to some embodiments of the present disclosure is provided. The substrate processing brush includes a holder; a substrate processing pad detachably disposed in the holder, processing the substrate; and a substrate processing sweeper connected to the holder, processing the substrate together with the substrate processing pad, wherein a first portion of the substrate processing pad is disposed inside the holder, and a second portion of the substrate processing pad is protruded to the outside of the holder by passing through one surface of the holder, and the substrate processing sweeper is connected to one surface of the holder so that it is to be adjacent to the second portion of the substrate processing pad protruded to the outside of the holder, and is extended from one surface of the holder.