Detachable Mid-Temp Electrostatic Chuck for Faster ESC Replacement
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Solution Overview
Problem
Existing electrostatic chucks (ESCs) in substrate processing systems are prone to damage and replacement of the entire substrate support is expensive, leading to increased tool downtime.
Innovation Solution
A detachable substrate support system comprising a dielectric plate with chucking electrodes, a support plate with fastener and electrode feedthrough openings, and a base plate removably coupled via fasteners, allowing for easy service and reduced replacement costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an ESC is integrated into a substrate support for mid and room temperature applications, then the substrate support can effectively retain substrates, but the ESC may become damaged or fail over time requiring expensive replacement of the entire substrate support
Solution Approach 1:
The substrate support is divided into separate modular components: the ESC assembly (including dielectric plate and electrodes) is detachably coupled to the support structure via a lower assembly with fastener openings. This segmentation allows the ESC to be replaced independently without replacing the entire substrate support, reducing replacement cost and complexity while maintaining reliability.
2Reliability
If an ESC is used for mid temperature applications (90 to 200 Celsius), then the substrate can be retained effectively, but replacement of the entire substrate support leads to increased tool downtime
Solution Approach 1:
The detachable lower assembly with fastener openings enables quick removal and replacement of the ESC component without disturbing the rest of the substrate support structure. This reduces maintenance time and tool downtime while preserving the substrate retention capability of the ESC.
Solution Approach 2:
The coupling mechanism transitions from a permanent fixed connection to a dynamic removable connection, allowing the ESC assembly to be easily detached and reattached. This dynamic design facilitates rapid maintenance operations while maintaining operational reliability.
3Productivity
If an ESC is made detachable from the lower assembly, then preventative maintenance time and replacement cost are reduced, but the structural complexity of the substrate support increases
Solution Approach 1:
The substrate support is segmented into modular components with standardized interfaces (fastener openings in the lower assembly). This segmentation improves maintenance efficiency by enabling quick ESC replacement while the modular design with clear interfaces actually simplifies the overall structure compared to a monolithic design.
Solution Approach 2:
The lower assembly with fastener openings serves multiple functions: structural support, detachable coupling mechanism, and alignment feature. This multi-functionality reduces the need for separate components, thereby reducing overall device complexity while improving maintenance efficiency.
Data Source
AI summary
Embodiments of substrate supports are provided herein. In some embodiments, a substrate support includes: a dielectric plate having one or more chucking electrodes disposed therein, an upper surface for supporting a substrate, and a lower surface opposite the upper surface; a support plate bonded to the dielectric plate and having an outer ring extending radially outward beyond the dielectric plate, wherein the outer ring includes one or more fastener openings, and wherein the support plate includes one or more electrode feedthrough openings at an inner region of the support plate; and a base plate removably coupled to the support plate via the one or more fastener openings.