Detachable Flow Rate Verification Unit for Mass Flow Controllers
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Solution Overview
Problem
Conventional flow rate verification units for integrated gas units are not effectively utilized across multiple units due to their specificity to each integrated gas unit, leading to inaccurate flow rate measurements and the need for frequent recalibration, which results in inefficiency and reduced accuracy.
Innovation Solution
A detachable flow rate verification unit that includes a pressure gauge, thermometer, and shutoff valve, connected via a detachable connection part, which uses a verification gas input valve, verification-side mass flow controller, and verification-side flow rate regulation valve to calculate the volume between the flow rate regulation valve and shutoff valve, allowing for accurate flow rate verification without relying on the integrated gas unit's mass flow controller.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional flow rate verification unit is dedicated to each integrated gas unit, then the verification accuracy is maintained, but the device complexity and the number of required verification units increase
Solution Approach 1:
The flow rate verification unit is designed with a detachable connection part that can be connected to different integrated gas units, allowing a single verification unit to serve multiple gas units. The unit includes a verification gas input valve, verification-side mass flow controller, and verification-side flow rate regulation valve that can be detached and reattached to different units, providing universal functionality across multiple integrated gas units while maintaining verification accuracy.
2Ease of operation
If the verification unit uses the integrated gas unit's mass flow controller, then the verification process is simplified, but the measurement precision decreases due to product adhesion errors
Solution Approach 1:
The verification unit is segmented into two separate systems: the integrated gas unit's mass flow controller and the verification-side mass flow controller. The verification-side controller is dedicated solely to verification operations, separating the verification function from the normal operation function. This segmentation prevents product adhesion errors from affecting verification accuracy while keeping the verification process independent and reliable.
Solution Approach 2:
A verification-side mass flow controller acts as an intermediary device between the verification gas input and the integrated gas unit. This intermediary controller measures the verification gas flow rate independently, providing accurate verification data without being affected by product adhesion in the integrated gas unit's mass flow controller.
3Adaptability or versatility
If a detachable connection part is added to enable multi-unit usage, then the adaptability increases, but the device complexity increases
Solution Approach 1:
The connection part is designed with universal interfaces that can be detached and connected to different integrated gas units. This detachable design enables a single verification unit to adapt to multiple gas units without requiring complex custom interfaces for each unit, achieving versatility through standardized detachable connections.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables a single flow rate verification unit to be used across multiple integrated gas units, providing stable and accurate flow rate verification by calculating the volume between the flow rate regulation valve and shutoff valve, thus improving the efficiency and accuracy of the verification process.
Implementation Method 1
The mass flow controller is, for example, configured to measure the flow rate based on a temperature difference between an upstream side and a downstream side of a thin inner pipe through which the operation gas flows
Implementation Method 2
by use of a pressure variation value of a pressure measured value per unit time measured by the pressure gauge
Implementation Method 3
a temperature measured value measured by the thermometer
Data Source
AI summary
A flow rate verification unit that uses the pressure variation value per unit time of a pressure measurement value measured by a pressure gauge and a temperature measurement value measured by a thermometer in a state where a second shut-off valve is closed to calculate the volume between a flow-rate control valve and the second shut-off valve and verifies the flow rates of mass flow controllers one at a time, wherein a first verification side connection part attachably and detachably connected to an integrated gas unit is provided upstream from the pressure gauge and a serially connected verification gas input valve, verification side mass flow controller, and verification side flow rate control valve are provided in parallel with the second shut-off valve.