Detachable Sample Adjusting Unit for Ion Milling Precision
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Solution Overview
Problem
Existing sample holder systems for ion milling apparatuses have complex configurations due to integrated fine adjustment mechanisms, which can lead to thermal expansion and displacement issues when exposed to ion beams, requiring additional heat radiating mechanisms and increasing complexity.
Innovation Solution
A sample holder system with a detachable sample adjusting unit that includes a position adjusting jig and swinging mechanism, allowing for precise positioning of the sample and shielding plate without integrating the adjustment mechanisms into the sample holder, thereby simplifying the configuration and preventing thermal expansion issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the fine adjustment mechanism is integrated with the sample holder, then the positioning precision is improved, but the device complexity increases
Solution Approach 1:
The patent divides the sample holder system into separate functional modules: the sample holder body and the fine adjustment mechanism are disconnected and can be used independently or combined. This segmentation reduces the overall device complexity while maintaining positioning precision when needed.
Solution Approach 2:
The patent introduces a swinging mechanism that allows the sample holder to dynamically adjust its position and orientation. This dynamic adjustment capability replaces complex integrated fine adjustment mechanisms while achieving precise positioning through controlled swinging motions.
2Measurement precision
If the fine adjustment mechanism is integrated with the sample holder, then the positioning precision is improved, but the thermal stability deteriorates
Solution Approach 1:
By disconnecting the fine adjustment mechanism from the sample holder, the patent separates the thermal zones. The sample holder can be positioned in areas with stable thermal conditions, while the adjustment mechanism operates independently, preventing thermal expansion from affecting positioning accuracy.
Solution Approach 2:
The patent introduces a swinging mechanism as an intermediary between the sample holder and the fine adjustment mechanism. This intermediary allows precise positioning to be achieved through mechanical swinging motions rather than thermal expansion, eliminating the thermal stability problem.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a simpler configuration with reduced risk of thermal expansion and displacement, eliminating the need for heat radiating mechanisms and enhancing the precision and reliability of sample positioning and processing.
Implementation Method 1
The holding portion holds an other of the sample and the shielding plate and is swingably supported by the holder body
Data Source
AI summary
A sample holder system includes a sample holder and a sample adjusting unit. The sample holder includes a shielding plate, a holder body, a holding portion, and a fastening mechanism. The fastening mechanism fastens the holding portion to the holder body, the fastening mechanism preventing the holding portion from swinging when the holding portion is fastened to the holder body. The sample adjusting unit includes a position adjusting jig that comes into contact with the holding portion, and a swinging mechanism that supports the position adjusting jig such that the position adjusting jig is swingable.