Detachable Wall Structure for Low-Damage Thin Layer Transfer

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Solution Overview

Problem

Existing methods for transferring thin layers in microelectronic and optical applications often result in substrate loss and quality degradation due to mechanical and chemical treatments, which are costly and difficult to precisely control, limiting their effectiveness and scope of application.

Innovation Solution

A method involving a removable structure with disjointed walls on a support substrate, where mechanical stress is applied to cause bending and rupture of these walls, allowing for the transfer of a surface layer onto a target substrate while minimizing substrate loss and preserving layer quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If mechanical stress or chemical treatment is applied to detach the thin layer from the initial substrate, then the thin layer can be transferred to the target substrate, but the quality of the thin layer is likely to be degraded

Engineering Contradiction:
Improvetransfer qualityVSAvoidlayer quality degradation
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The removable layer is segmented into multiple separate walls distributed in a predefined network pattern. This segmentation allows the mechanical stress to be distributed across multiple discrete rupture points rather than concentrating stress across the entire interface, enabling controlled detachment that preserves thin layer quality while achieving complete transfer

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The removable layer acts as an intermediary structure between the initial substrate and the thin layer. It provides a controlled detachment mechanism through its wall rupture, mediating the transfer process to avoid direct mechanical or chemical contact between the thin layer and the substrate removal process

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If detachment is achieved by inserting a blade or applying tensile stresses, then the thin layer can be separated from the initial substrate, but the mechanical treatments are likely to degrade the thin layer quality

Engineering Contradiction:
Improvedetachment capabilityVSAvoidmechanical damage to thin layer
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

Instead of applying tensile stress to pull the thin layer away from the substrate, the invention inverts the approach by causing the removable layer walls to rupture and collapse, which passively releases the thin layer. The detachment is achieved through wall rupture rather than direct pulling, reducing mechanical stress on the thin layer

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The invention replaces direct mechanical blade insertion or tensile stress application with a controlled wall rupture mechanism. The mechanical stress is applied to the removable layer walls rather than directly to the thin layer, substituting a more controlled mechanical system that protects the thin layer from damage

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If chemical treatment is applied to detach the thin layer, then the transfer can be achieved, but the chemical attack can hardly be precisely localized at the weakened layer or interface

Engineering Contradiction:
Improvetransfer completenessVSAvoidlocalization precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The removable layer is segmented into discrete walls that are spatially distributed in a predefined network. This segmentation confines the chemical attack to specific localized regions at each wall-substrate interface, preventing uncontrolled chemical propagation across the entire substrate and enabling precise localization of the detachment zones

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The removable layer structure creates locally distinct detachment zones at each wall interface with the substrate. The chemical treatment can be precisely applied to these localized regions, and the wall structure ensures that chemical attack remains confined to these specific locations rather than spreading uniformly across the entire interface

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces substrate loss and preserves the quality of the thin layer during transfer, offering a more efficient and controlled method for layer manipulation and integration onto target substrates.

Implementation Method 1

Applying mechanical stress to detach the surface layer from the support substrate; the mechanical stress is configured to cause bending of the walls, in a direction secant to said flank, until causing mechanical rupture of said walls

Methodology Applied
Scientific EffectMechanical stress: Mechanical Force

Implementation Method 2

the mechanical stress is configured to cause bending of the walls, in a direction secant to said flank, until causing mechanical rupture of said walls

Methodology Applied
Scientific EffectBending: Deformation

Data Source

PatentEP3721470B1Method for transferring a layer by using a detachable structure
Publication Date: 2024.08.14 SOITEC SA
  • EP3721470B1 patent drawingFigure 1~2b
  • EP3721470B1 patent drawingFigure 2c~2d
  • EP3721470B1 patent drawingFigure 2e~2f

AI summary

The invention relates to a method for transferring a superficial layer from a detachable structure (100) comprising the following steps: a) supplying the detachable structure (100) comprising: • a support substrate (10), • a detachable layer (20) arranged on the support substrate (10) along a main plane (x, y) and comprising a plurality of walls (21) that are separated from one another, each wall (21) having at least one side that is perpendicular to the main plane (x, y); • a superficial layer (30) arranged on the detachable layer (20) along the main plane (x, y); b) applying a mechanical force configured to cause said walls (21) to bend along a direction that is secant to said side, until causing the mechanical rupture of the walls (21), in order to detach the superficial layer (30) from the support substrate (10).