Detection Element With Alternating Stress Insulating Layer

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Solution Overview

Problem

Conventional radiation detectors face challenges in achieving high-resolution radiation images with high signal intensity and high S/N ratios due to insufficient electric field intensity and disorder at the interface between the insulating layer and the through electrode, leading to issues with gas amplification.

Innovation Solution

A detection element with a substrate having a through hole, an insulating layer, and a through electrode, where the insulating layer is alternately stacked with layers of tensile and compressive stress, and a resin layer exposing the through electrode, allowing for improved electric field concentration and gas amplification.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the upper end part of the anode electrode is in contact with the resin layer, then the electric field concentration is improved, but the electric field disorder occurs and sufficient electric field intensity cannot be obtained

Engineering Contradiction:
Improveelectric field intensityVSAvoidelectric field stability
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The patent introduces an insulating layer as an intermediary substance between the anode electrode and the resin layer. This insulating layer prevents direct contact between the electrode and resin, thereby eliminating the electric field disorder caused by contact while still allowing the resin layer to provide mechanical support and positioning functions.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent segments the structure by separating the functions of electrical contact and mechanical support. The anode electrode provides electrical function, the insulating layer provides electrical isolation, and the resin layer provides mechanical support. This segmentation resolves the contradiction by allowing each component to perform its specific function without interfering with others.

Inventive Principle:
Principle #1Segmentation

2Illumination intensity

If the anode electrode size is smaller than the through electrode, then the electric field concentration at the upper end is improved, but the gas amplification ratio cannot be sufficiently obtained

Engineering Contradiction:
Improveelectric field concentrationVSAvoidgas amplification ratio
Core Design Contradiction:
Illumination intensityVSObject-generated harmful factors

Solution Approach 1:

The patent applies local quality by creating different regions with different properties: the upper end region has high electric field concentration for signal detection, while the lower end region maintains sufficient electrode size for gas amplification. The insulating layer enables this spatial differentiation of functional requirements.

Inventive Principle:
Principle #3Local quality

3Stability of the object's composition

If a through hole is filled with a through electrode and constricted by an insulating resin layer, then the structure stability is improved, but the manufacturing precision of electric field distribution deteriorates

Engineering Contradiction:
Improvestructure stabilityVSAvoidelectric field distribution precision
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The insulating layer serves as a mediator that decouples the structural support function from the electrical field distribution function. This allows the resin layer to provide structural stability without directly interfering with the precision of electric field distribution, as the insulating layer acts as a buffer between the two systems.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the attainment of high-resolution radiation images with high signal intensity and high S/N ratios by ensuring a stable and intense electric field near the pixel electrode, enhancing the gas amplification ratio.

Implementation Method 1

The insulating layer has a structure in which alternately stacked with a plurality of layers having tensile stress and a plurality of layers having compressive stress

Methodology Applied
Scientific EffectStress:

Implementation Method 2

a pre-determined electric potential is set between the first electrode pattern and the second electrode pattern

Methodology Applied
Scientific EffectElectric Field: Electric Field

Implementation Method 3

gas electron amplification type radiation detectors using pixel type electrodes

Methodology Applied
Scientific EffectGas electron amplification: Electron Avalanche

Data Source

PatentEP3361492B1Detection element
Publication Date: 2022.08.24 DAI NIPPON PRINTING CO LTD
  • EP3361492B1 patent drawingFigure 1
  • EP3361492B1 patent drawingFigure 2
  • EP3361492B1 patent drawingFigure 3

AI summary

A detection element can obtain a high-resolution radiation image having a high signal intensity and a high S/N ratio. A detection element including a substrate having a through hole, an insulating layer arranged inside of the through hole, a through electrode arranged further to the inner side of the through hole than the insulating layer, a resin layer having insulating properties and having an opening portion exposing the through electrode, a first electrode arranged above the through electrode and the resin layer, the first electrode being connected to the through electrode through the opening portion, and a second electrode arranged above the resin layer, the second electrode being separated from the first electrode.