Detection Substrate Orientation Control for Nozzle Height Measurement
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Solution Overview
Problem
In semiconductor manufacturing, accurately detecting the height of a solvent discharge nozzle within a processing space is challenging due to the variable orientation of detection substrates, which can lead to interference with elevated members and suboptimal processing results.
Innovation Solution
A detection system that includes a detection substrate with a camera and acceleration sensors to estimate the orientation of the camera within the processing space, allowing for precise detection of the nozzle height by correlating acceleration patterns with the camera's position, thereby minimizing substrate rotation and avoiding interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the detection substrate is loaded without orientation control, then the loading process is simple, but the camera orientation becomes variable causing detection inaccuracies and potential interference with elevated members
Solution Approach 1:
The acceleration detectors measure acceleration during the substrate loading process before the detection operation begins. The control device calculates the substrate orientation based on these preliminary acceleration measurements, and then rotates the substrate to the correct orientation before nozzle height detection. This preliminary orientation correction ensures accurate detection without requiring complex real-time control during detection.
2Measurement precision
If the substrate is rotated extensively to correct orientation, then detection accuracy improves, but processing time increases and interference with elevated members may occur
Solution Approach 1:
The system measures acceleration during the loading process itself, before detection begins. By calculating the required rotation angle from these preliminary measurements and performing the rotation before detection, the system minimizes additional processing time. The substrate is rotated only to the necessary extent to achieve correct orientation, avoiding excessive rotation that would waste time or cause interference.
3Adaptability or versatility
If acceleration detectors are added to the detection substrate, then orientation estimation becomes possible, but the substrate complexity and cost increase
Solution Approach 1:
The detection substrate performs self-measurement of its own orientation by using acceleration detectors mounted on the substrate itself. The substrate measures its own acceleration during loading, and the control device calculates the substrate's orientation relative to the apparatus based on these self-measured values. This self-service approach eliminates the need for separate external orientation measurement systems.
Solution Approach 2:
The acceleration detectors on the detection substrate serve multiple functions: they measure the substrate's orientation during loading, and the data is also used to determine the rotation angle needed for correct positioning. This multi-functionality reduces the need for separate dedicated components for each measurement task.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the usability of detection substrates by reducing the need for extensive rotation, preventing interference and improving the accuracy of nozzle height detection, thus optimizing processing results and reducing costs by allowing shared detection substrates across multiple apparatuses.
Implementation Method 1
at least one acceleration detector configured to detect an acceleration in each of two directions intersecting each other in a surface of the substrate
Data Source
AI summary
A detection system configured to detect a state of a structure within a processing space of a substrate processing apparatus, includes: a detection substrate including a state detector that detects the state of the structure; a transfer device that loads and unloads each of a substrate to be processed and the detection substrate into and from the processing space; and a control device, wherein the detection substrate further includes at least one acceleration detector that detects an acceleration in each of two directions intersecting each other in a surface of the substrate, and wherein the control device estimates an orientation of the state detector on the detection substrate within the processing space based on a detection result obtained by the at least one acceleration detector when the detection substrate is moved in a loading/unloading direction during loading or unloading of the detection substrate into or from the processing space.