Semiconductor Detector Field Plates for Higher-Bias CPS

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Solution Overview

Problem

Existing semiconductor detectors face challenges in achieving optimal performance metrics such as Full Width at Half Maximum (FWHM) and Counts Per Second (CPS) due to interrelated biases affecting rise time, making it difficult to reduce rise time while maintaining optimal FWHM.

Innovation Solution

The semiconductor detector incorporates connection wires connecting drift electrodes not connected to field plate electrodes with charge collection electrodes, suppressing dark current and enabling higher bias application, along with field plate electrodes covering inter-electrode regions between three or more drift electrodes to control potential distribution.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If higher bias is applied to reduce rise time and improve CPS, then charge collection efficiency improves, but dark current and leak current increase

Engineering Contradiction:
ImproveCPSVSAvoiddark current
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The detector is divided into multiple drift electrodes arranged in concentric circles, with field plate electrodes positioned between them. This segmentation allows independent voltage control of each drift electrode region, enabling optimization of charge collection paths while suppressing dark current through localized potential control.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Field plate electrodes serve as intermediary elements between drift electrodes, providing a mediator potential that suppresses dark current and leak current. These field plate electrodes are positioned at higher potentials than adjacent drift electrodes, creating a protective potential barrier that prevents unwanted current flow while allowing the drift electrodes to operate at optimized biases for reduced rise time.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If field plate electrodes are added to suppress dark current, then leak current decreases, but device complexity increases

Engineering Contradiction:
Improveleak current suppressionVSAvoidelectrode structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The field plate electrodes are integrated into the existing drift electrode structure, combining the functions of dark current suppression and charge collection in a unified electrode arrangement. The field plate electrodes are positioned between drift electrodes and connected to higher potential, merging the potential control function with the existing structural framework rather than adding completely separate components.

Inventive Principle:
Principle #5Merging (Combining)

3Speed

If drift electrodes are arranged to collect charges efficiently, then charge collection speed improves, but potential distribution becomes complex

Engineering Contradiction:
Improvecharge collection speedVSAvoidpotential distribution
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

Different regions of the detector are assigned different potentials through the concentric drift electrode arrangement. Inner drift electrodes are at higher potentials than outer ones, creating locally optimized electric fields that guide charges efficiently to the signal detection electrode while maintaining overall potential distribution control through the field plate electrodes.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces rise time and improves CPS by allowing higher optimal bias settings, enhancing charge collection efficiency and suppressing leak currents.

Implementation Method 1

charge carriers generated by electromagnetic waves traveling in a depletion layer, to which a drift electric field is applied, to a signal detection electrode through the drift electric field

Methodology Applied
Scientific EffectDrift electric field: Electric Field

Implementation Method 2

a depletion layer is expanded throughout the entire semiconductor substrate by applying a reverse bias voltage to a pn junction formed on the semiconductor substrate

Methodology Applied
Scientific EffectDepletion layer: Electric Field

Implementation Method 3

field plate electrodes formed on the first surface of the semiconductor substrate to suppress electrical current flowing between the drift electrodes

Methodology Applied
Scientific EffectElectrical current suppression: Electric Field

Data Source

PatentUS20250306221A1Semiconductor detector
Publication Date: 2025.10.02 HITACHI HIGH TECH ANALYSIS CORP
  • US20250306221A1 patent drawing
  • US20250306221A1 patent drawing
  • US20250306221A1 patent drawing

AI summary

Proposed is a semiconductor detector that can improve CPS by reducing a rise time by being operated with higher bias. The semiconductor detector includes a semiconductor substrate, a first surface-side insulating film, a signal detection electrode, a plurality of drift electrodes, an incident window 5 for radiation, a p-type semiconductor region, depletion electrodes, a plurality of field plate electrodes, charge collection electrodes disposed in inter-electrode regions between adjacent drift electrodes; a plurality of drift electrode connection portions electrically connecting some of the plurality of drift electrodes and the field plate electrodes, and connection wires electrically connecting the drift electrodes not connected to the field plate electrodes by the drift electrode connection portions and the charge collection electrodes through collection electrode connection portions.