Detector Mask with Selective Transmission Profiles for Electron Microscopy
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Solution Overview
Problem
Current microscopy and spectroscopy systems face challenges in achieving precise control over the acceptance angle and imaging modes, limiting the range of collection angles and image contrast, especially in scanning transmission electron microscopy (STEM) and scanning electron microscopy (SEM) applications.
Innovation Solution
The integration of a sample holder with flexible cantilever arms and a detector mask with adjustable transmission profiles, allowing for angularly-selective transmission and acceptance angle control, enabling various imaging modes such as bright field, dark field, and annular dark field imaging by positioning the sample and selecting appropriate transmission orifices.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a fixed detector mask with limited transmission profiles is used, then the device complexity is reduced, but the adaptability for different imaging modes and acceptance angles is limited
Solution Approach 1:
The patent employs multiple detector masks with different transmission profiles that can be selectively positioned into the beam path. This dynamic configuration allows the system to adapt between different imaging modes (bright field, dark field, annular dark field) and acceptance angles by selecting appropriate masks, rather than requiring a single complex adjustable mask.
Solution Approach 2:
The detection system is divided into multiple discrete detector masks, each optimized for specific imaging modes and acceptance angle ranges. By segmenting the detection functionality across multiple specialized masks rather than one general-purpose mask, the system achieves high adaptability while keeping each individual mask relatively simple in design.
2Measurement precision
If the camera length range is extended to improve image contrast and resolution, then the measurement precision is improved, but the device complexity increases due to additional transmission profiles
Solution Approach 1:
The system dynamically adjusts the effective camera length and collection angle by selecting different detector masks with appropriate transmission profiles. This allows extension of the measurable camera length range while maintaining precise control over image contrast and resolution, without requiring a single overly complex transmission profile.
Solution Approach 2:
Each detector mask is designed with a specific transmission profile optimized for particular imaging requirements (e.g., bright field uses a different profile than dark field). This local optimization of transmission characteristics for specific functions enables high measurement precision in each mode while avoiding the need for one universally complex mask design.
3Adaptability or versatility
If multiple detector masks with different transmission profiles are used, then the adaptability for various imaging modes is improved, but the device complexity increases
Solution Approach 1:
The detection system is segmented into multiple discrete detector masks, each optimized for specific imaging modes and acceptance angle ranges. By segmenting the detection functionality across multiple specialized masks rather than one general-purpose mask, the system achieves high adaptability while keeping each individual mask relatively simple in design.
Solution Approach 2:
Despite being multiple specialized masks, the system achieves universal functionality by providing a comprehensive set of transmission profiles that cover all major imaging modes (bright field, dark field, annular dark field) and acceptance angle ranges. The collection of simple, specialized masks collectively provides multi-functional capability equivalent to or exceeding a single complex adjustable mask.
Data Source
AI summary
A detector mask transmits selectively a plurality of probe particles to a particle detector, the detector mask includes: a plate including a plate wall disposed in the plate and enclosing a transmission orifice arranged in a transmission profile to: transmit probe particles having a trajectory coincident with the transmission orifice, block probe particles having a trajectory external to the transmission orifice, and form a probe particle beam comprising the probe particles transmitted by the transmission orifice to the particle detector, wherein the transmission profile includes a sector, a semi-circle, an annular sector, or a combination including at least one of the foregoing first transmission profiles.