Electromagnetic Radiation Detector with Sealed Encapsulation Release Vent
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Solution Overview
Problem
Existing devices for detecting electromagnetic radiation, such as infrared or terahertz, face issues where the optical and/or electrical properties of the absorbent membrane are degraded during production, and there is a risk of mechanical damage due to the encapsulation process.
Innovation Solution
A detection device with a substrate and thermal detectors, where the encapsulation layer has a single release vent positioned opposite the absorbent membrane, minimizing the impact of sacrificial layer residues and enhancing the structural integrity by using a sealing layer with a flared profile and internal support portions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If multiple release vents are provided in the encapsulation layer, then the sacrificial layers can be effectively evacuated from the cavity, but the optical and electrical properties of the absorbing membrane are degraded due to residue deposition
Solution Approach 1:
The invention extracts the harmful function of multiple release vents by replacing them with a single vent positioned opposite the absorbing membrane. This eliminates the residue deposition problem caused by multiple vents while maintaining effective evacuation of sacrificial layers through the single vent location.
Solution Approach 2:
The single release vent is positioned opposite the absorbing membrane from the outset, preventing residue deposition before it occurs. This preliminary positioning strategy ensures that sacrificial layer removal does not compromise the optical and electrical properties of the membrane.
2Reliability
If the encapsulation structure is made hermetically sealed, then the detector operates under optimal low pressure, but the mechanical integrity is compromised during sealing processes
Solution Approach 1:
The flared profile of the sealing layer is designed in advance to cushion and distribute mechanical stresses during the sealing process. This preemptive structural design prevents stress concentration that could damage the detector or compromise encapsulation integrity.
Solution Approach 2:
The sealing layer's flared profile changes the geometric parameters of the encapsulation structure, creating a gradual transition zone that reduces mechanical stress during sealing. This parameter modification allows hermetic sealing while preserving detector strength.
3Ease of manufacture
If the sealing layer has a vertical profile, then the manufacturing process is simplified, but the mechanical stresses during sealing cause deterioration of the encapsulation structure
Solution Approach 1:
The sealing layer is given a flared, curved profile instead of a vertical straight profile. This curvature distributes mechanical stresses more evenly during sealing, preventing structural deterioration while remaining compatible with standard manufacturing processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Preserves the optical and electrical properties of the absorbent membrane and reduces mechanical damage risks, ensuring optimal detector performance and hermeticity.
Implementation Method 1
having a membrane adapted to absorb the radiation to be detected
Data Source
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AI summary
The invention relates to an electromagnetic radiation detection device (1), comprising: - a substrate, - at least one thermal detector (2), disposed on the substrate, having an absorbing membrane suspended above the substrate, - an encapsulation structure (5) for the thermal detector, comprising an encapsulation layer (6) extending around and above said thermal detector so as to define with the substrate a cavity (4) in which said thermal detector is located, characterized in that the encapsulation layer includes at least one through orifice (8) called a release vent, each release vent being disposed so that at least one thermal detector has a single release vent located opposite the corresponding absorbing membrane, preferably at the center of said absorbing membrane.