Device Inspection Circuit Current Measurement Feedback
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Solution Overview
Problem
The increasing number of semiconductor devices on a wafer poses challenges in measuring currents flowing through each device due to layout limitations, leading to increased costs and inefficiencies in prober and LSI tester designs, as existing solutions require multiple sense amplifiers and AD converters, which are difficult to install and costly.
Innovation Solution
A device inspection circuit with a single power source, operational amplifier, and resistors connected in series, utilizing feedback channels to measure currents flowing through multiple devices without the need for individual sense amplifiers and AD converters, allowing for cost-effective current measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple sense amplifiers and AD converters are installed to measure currents flowing through each device, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent combines multiple measurement functions into a single integrated circuit board. Instead of installing separate sense amplifiers and AD converters for each device, the invention uses one integrated circuit board that can measure currents for multiple devices simultaneously, thereby reducing component count while maintaining measurement precision
Solution Approach 2:
The integrated circuit board is designed with multi-functionality to perform current measurement for multiple different devices. The board can be configured to measure currents flowing through various devices by changing connection relationships, making a single component serve multiple measurement purposes
2Difficulty of detecting and measuring
If multiple sense amplifiers and AD converters are installed to measure currents, then measurement capability is improved, but ease of manufacture deteriorates due to layout limitations
Solution Approach 1:
The patent merges multiple measurement functions into a single integrated circuit board that can be installed in one location. This eliminates the need to install multiple separate components in different locations, significantly easing the manufacturing and installation process while maintaining full measurement capability
Solution Approach 2:
The invention changes the dimensional arrangement by using an integrated circuit board that consolidates multiple measurement functions in a two-dimensional plane, rather than distributing components throughout the three-dimensional space of the prober, thereby overcoming layout limitations
3Device complexity
If a single power source is used to supply electric power to multiple devices, then device complexity is reduced, but power supply capability deteriorates due to insufficient electric power for each device
Solution Approach 1:
The patent introduces a switching element that dynamically connects and disconnects the operational amplifier from the power supply circuit. This allows the system to adapt between different power supply modes: using the operational amplifier when high precision is needed, and bypassing it when maximum power is required, thereby resolving the contradiction between power efficiency and power capability
Solution Approach 2:
The invention changes the electrical parameters (impedance, gain) of the power supply circuit dynamically by switching the operational amplifier in and out of the circuit. This allows the single power source to provide both high-precision control and high-power output as needed, addressing the power insufficiency problem
4Power
If operational amplifier is added to amplify electric power for each device, then power supply capability is improved, but device complexity and cost increase
Solution Approach 1:
The patent merges the power amplification function into a single operational amplifier that serves multiple devices. Instead of having separate power supply circuits for each device, one operational amplifier is shared among multiple devices, reducing component count while maintaining the ability to provide sufficient power to each device
Solution Approach 2:
The operational amplifier is dynamically switched in and out of the power supply circuit based on the specific measurement or power requirements. This dynamic configuration allows a single operational amplifier to effectively serve multiple devices with different power needs, reducing overall system complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient measurement of currents flowing through multiple devices without increasing costs, by using a single power source and feedback channels to calculate device currents, reducing the need for additional measurement components and improving inspection efficiency.
Implementation Method 1
the power supply circuit 102 includes an operational amplifier for amplifying the electric power supplied from the single power source 101
Implementation Method 2
a first feedback channel configured to apply a voltage between the first resistor and the at least one device to an inverting input terminal of the operational amplifier
Data Source
AI summary
There is provided a device inspection circuit capable of measuring currents flowing through a plurality of devices without increasing the cost. A power supply circuit of a box-side inspection circuit includes an operational amplifier and a sense resistor. A power source having a current measuring function, the operational amplifier, the sense resistor and a DUT are connected in series in this order. The power source is connected to a non-inverting input terminal of the operational amplifier. The power supply circuit further includes a negative feedback channel configured to apply a voltage between the sense resistor and the DUT to an inverting input terminal of the operational amplifier, and a positive feedback channel configured to connect an upstream sense point between the operational amplifier and the sense resistor and the non-inverting input terminal of the operational amplifier. The positive feedback channel includes a feedback resistor installed therein.