DFM Simulation Optimization via Multi-Loop Parameter Adjustment

The patent segments the DFM simulation process into multiple optimization loops (outer loop for coarse optimization, inner loop for fine optimization). This segmentation allows the simulation to progressively refine parameter settings rather than requiring a single exhaustive optimization run, thereby reducing total computational time while maintaining manufacturing reliability.

The patent performs preliminary coarse optimization in the outer loop before conducting detailed fine optimization in the inner loop. This preliminary action establishes a good initial parameter range that narrows down the search space for subsequent detailed optimization, significantly reducing the overall computational time required to achieve high manufacturing reliability.

The patent divides the optimization process into two segmented loops with different levels of detail. The outer loop performs coarse optimization with lower computational complexity to establish broad parameter ranges, while the inner loop performs fine optimization with higher accuracy only within those narrowed ranges. This segmentation achieves high prediction accuracy without requiring the full computational complexity to be applied throughout the entire optimization process.

The patent applies partial optimization action by performing coarse optimization first to establish sufficient parameter ranges, then applying fine optimization only where needed. This partial approach achieves the necessary prediction accuracy for meaningful early warnings without the excessive computational complexity that would result from applying maximum detail throughout the entire optimization process.