Diagnostic Disc Wear Sensing for In-Situ Process Kit Rings
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Solution Overview
Problem
Conventional methods for detecting the end-of-life (EoL) of process kit rings in plasma processing chambers are labor-intensive and disrupt productivity, as they require venting the chamber and exposing it to the atmosphere, leading to contamination and lengthy requalification processes.
Innovation Solution
A method using non-contact sensors to monitor the erosion of process kit rings within the chamber, analyzing sensor data to determine EoL thresholds, and initiating automated replacement without venting the chamber, utilizing a diagnostic disc with attached sensors and a computing system for wireless communication and data analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional venting and disassembly methods are used to detect edge ring wear, then measurement precision is improved, but productivity is reduced due to chamber downtime and requalification processes
Solution Approach 1:
The patent replaces mechanical disassembly and visual inspection methods with optical sensing technology. A sensor system captures images of the edge ring through a plasma-resistant window, and image processing algorithms automatically measure wear depth and determine end-of-life conditions, eliminating the need to vent the chamber or disassemble components for inspection
Solution Approach 2:
The patent introduces a plasma-resistant optical window as an intermediary element that allows optical sensors to view the edge ring through the plasma environment without being damaged by corrosive species. This window enables continuous in-situ monitoring while maintaining chamber integrity and preventing contamination
2Ease of operation
If the processing chamber is vented and disassembled for edge ring inspection, then ease of operation is improved, but the chamber is exposed to contamination risks
Solution Approach 1:
The patent replaces mechanical access methods (venting and disassembly) with optical sensing through a sealed window. The sensor system captures images through the plasma-resistant window without requiring the chamber to be opened, maintaining ease of operation through automated imaging and analysis while eliminating contamination exposure
Solution Approach 2:
The patent maintains the chamber's sealed, inert plasma environment throughout the inspection process. The optical window allows viewing and measurement while the chamber remains closed and protected from atmospheric contamination, eliminating the need to break the vacuum seal
3Reliability
If frequent edge ring replacement is performed using conventional methods, then reliability is improved, but loss of time increases due to repeated venting and requalification
Solution Approach 1:
The patent enables continuous monitoring of edge ring wear without interrupting substrate processing. The optical sensor system operates in-situ through the plasma-resistant window, allowing wear detection and end-of-life determination to occur during normal chamber operation, eliminating repeated downtime for inspection and replacement scheduling
Solution Approach 2:
The patent performs preliminary wear assessment continuously during operation, allowing edge ring replacement to be scheduled optimally based on actual wear conditions rather than fixed time intervals. This prevents premature replacement and reduces unnecessary downtime while maintaining process reliability
Data Source
AI summary
A diagnostic disc includes a disc body having a sidewall around a circumference of the disc body and at least one protrusion extending outwardly from a top of the sidewall. A non-contact sensor is attached to an underside of each of the at least one protrusion. A a printed circuit board (PCB) is positioned within an interior formed by the disc body. Circuitry is disposed on the PCB and coupled to each non-contact sensor, the circuitry including at least a wireless communication circuit, a memory, and a battery. A cover is positioned over the circuitry inside of the sidewall, wherein the cover seals the circuitry within the interior formed by the disc body from an environment outside of the disc body.