Diagnostic Disc Power Source for Vacuum and High-Temperature Monitoring

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current vacuum processing systems require frequent maintenance and downtime due to the need for venting and disassembly to assess chamber components, leading to labor-intensive procedures, contamination risks, and productivity losses.

Innovation Solution

A diagnostic disc with non-contact sensors and a wireless communication system that allows for in-situ measurements within the processing chamber, enabling secure wireless communication and data transmission to a computing system for analysis, without venting the chamber, and a power source tolerant to vacuum and high temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the processing chamber is vented and opened to assess chamber components, then maintenance and inspection can be performed, but productivity is lost and contamination risk increases

Engineering Contradiction:
Improvecomponent condition assessmentVSAvoidequipment uptime
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent replaces mechanical disassembly and visual inspection with non-contact sensors (optical, electromagnetic, or other remote sensing technologies) that can assess chamber components through the closed chamber window or port, eliminating the need to vent and open the chamber for inspection

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an intermediary diagnostic system with non-contact sensors that act as a mediator between the operator and the chamber components, allowing assessment without direct physical access or chamber opening

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of repair

If the processing chamber is vented and opened for maintenance, then components can be cleaned or replaced, but contamination of the chamber interior occurs

Engineering Contradiction:
Improvecomponent maintenanceVSAvoidchamber contamination
Core Design Contradiction:
Ease of repairVSObject-affected harmful factors

Solution Approach 1:

The patent replaces mechanical access and manual cleaning operations with non-contact sensors for diagnosis and automated remote maintenance systems that can clean or replace components through sealed ports without exposing the chamber interior to contamination

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Use of energy by moving object

If conventional power sources are used in the diagnostic disc, then the disc can be powered, but the power source may rupture or explode in vacuum and high temperature conditions

Engineering Contradiction:
Improvepower supplyVSAvoidpower source stability
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The patent changes the physical and chemical parameters of the power source by using solid-state batteries or fuel cells with materials specifically selected for vacuum and high-temperature tolerance, operating at different voltage/current characteristics suitable for the diagnostic disc's low-power electronics

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite materials in the power source construction, combining vacuum-tolerant electrolytes, heat-resistant separators, and chemically stable electrodes that can withstand the extreme conditions inside the processing chamber without degrading or causing contamination

Inventive Principle:
Principle #40Composite materials

Data Source

PatentUS11924972B2Diagnostic disc with a high vacuum and temperature tolerant power source
Publication Date: 2024.03.05 APPLIED MATERIALS INC
  • US11924972B2 patent drawing
  • US11924972B2 patent drawing
  • US11924972B2 patent drawing

AI summary

A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.