Diagnostic Disc Power Source for In-Situ Vacuum Chamber Sensing

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Solution Overview

Problem

Conventional vacuum processing systems require labor-intensive maintenance procedures that disrupt processing and risk contamination due to chamber venting and disassembly, leading to inconsistent results and particle defects on substrates.

Innovation Solution

A diagnostic disc with non-contact sensors and a power source tolerant to vacuum and high temperatures, enabling in-situ diagnostics and wireless communication to assess chamber components without disassembly, allowing for automated maintenance decisions based on sensor data.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of repair

If conventional maintenance procedures are used (venting and disassembly), then chamber components can be accessed and maintained, but productivity is lost and contamination risk increases

Engineering Contradiction:

Improveaccess to chamber componentsVSAvoidprocessing downtime

Core Design Contradiction:

Ease of repairVSProductivity

Solution Approach 1:

The patent replaces mechanical disassembly and venting procedures with non-contact optical sensors that can diagnose chamber components through the chamber wall or viewport, eliminating the need to physically open the chamber for inspection

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces non-contact sensors as an intermediary between the maintenance system and chamber components, allowing diagnostics to be performed without direct physical access or chamber opening

Inventive Principle:

Principle #24Intermediary (Mediator)

2Difficulty of detecting and measuring

If chamber is vented and opened for maintenance, then components can be inspected, but contamination of chamber interior occurs

Engineering Contradiction:

Improveinspection of chamber componentsVSAvoidchamber contamination

Core Design Contradiction:

Difficulty of detecting and measuringVSObject-affected harmful factors

Solution Approach 1:

The patent substitutes physical opening and visual inspection with non-contact optical sensing that can detect component conditions through the chamber wall or viewport, eliminating contamination risk entirely

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If conventional inspection methods are used, then component condition can be assessed, but labor intensive procedures are required

Engineering Contradiction:

Improvecomponent condition assessmentVSAvoidmaintenance procedure complexity

Core Design Contradiction:

Measurement precisionVSEase of operation

Solution Approach 1:

The patent replaces manual inspection procedures with automated non-contact sensors that optically detect component conditions, eliminating labor-intensive operations while maintaining or improving measurement precision

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system enables self-diagnosis of chamber components through automated sensors that continuously monitor component conditions without requiring operator intervention or manual inspection procedures

Inventive Principle:

Principle #25Self-service

4Ease of repair

If chamber is opened for maintenance, then components can be accessed, but requalification time is required

Engineering Contradiction:

Improvecomponent accessVSAvoidrequalification time

Core Design Contradiction:

Ease of repairVSLoss of time

Solution Approach 1:

The patent replaces physical chamber opening with non-contact optical sensing, eliminating the requalification process entirely since the chamber remains sealed and contaminated-free throughout the inspection procedure

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS12575032B2Diagnostic disc with a high vacuum and temperature tolerant power source

Publication Date: 2026.03.10 APPLIED MATERIALS INC

AI summary

A method includes establishing, by a diagnostic disc, a secure wireless connection with a computing system using a wireless communication circuit of the diagnostic disc before or after the diagnostic disc is placed into a processing chamber. The method further includes generating, by at least one non-contact sensor of the diagnostic disc, sensor data of a component disposed within the processing chamber. The method further includes storing the sensor data in a memory of the diagnostic disc. The method further includes wirelessly transmitting the sensor data to the computing system, using the wireless communication circuit. The method further includes terminating the secure wireless connection with the computing system and clearing the sensor data from the memory of the diagnostic disc.