Diagnostic Substrate RF Communication Through Plasma Chamber Interference
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Instrumented substrates in semiconductor manufacturing face challenges with real-time wireless communication due to strong electromagnetic fields in plasma chambers, which induce radio interference and block traditional wireless communication links, limiting data transfer to after processing and removal from the chamber.
Innovation Solution
Implementing a communication module on the substrate that uses the RF signal or plasma frequency as a carrier for data transmission, with a signal source providing a high-frequency signal modulated with a switch and antenna, allowing for impedance variation detection and demodulation for data extraction, and using a high-frequency modulator to upload data by mixing it with the RF generator's signal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If traditional wireless communication is used in plasma chamber, then real-time data communication is achieved, but electromagnetic interference blocks the communication link
Solution Approach 1:
The patent converts the harmful electromagnetic field in the plasma chamber into a useful communication carrier. By using the plasma frequency (e.g., 13.56 MHz) as the carrier wave for modulating data signals, the system transforms the electromagnetic interference that previously blocked communication into the very medium that enables communication. The sensor data is modulated onto the plasma frequency, allowing real-time wireless communication through the chamber wall without being blocked by the electromagnetic environment.
2Loss of information
If instrumented substrate is removed from chamber for data download, then data can be processed externally, but real-time monitoring is lost
Solution Approach 1:
The patent replaces the mechanical process of removing the substrate from the chamber for data download with a wireless electromagnetic communication system. The sensor data is transmitted wirelessly through the chamber wall using the plasma frequency as carrier, eliminating the need to physically remove the substrate. This substitution enables continuous real-time data monitoring while the substrate remains in the plasma chamber, eliminating the time loss associated with removal and transfer operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time data communication and analysis by overcoming electromagnetic interference, allowing for effective wireless data transfer within the plasma chamber without disrupting plasma processing.
Implementation Method 1
power from the RF generator is configured to be coupled into one or more gasses in the chamber to form the plasma
Implementation Method 2
the communication module is configured to wirelessly communicate with a device outside of the chamber using carrier signals at a carrier frequency that is an integer multiple of a frequency of the plasma
Data Source
AI summary
Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate and a sensor on the substrate. In an embodiment, the diagnostic substrate further comprises a communication module on the substrate that is communicatively coupled to the sensor. In an embodiment, the communication module comprises an output antenna, a switch coupled to the output antenna, and a signal source coupled to the switch.