Diamond Cooling Structure for Integrated Circuits
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Solution Overview
Problem
Traditional diamond cooling structures for integrated circuits require time-consuming and expensive subtractive processes, such as drilling and etching, which are wasteful and inefficient.
Innovation Solution
A method using a template with predetermined features to grow diamond only in selected areas through additive processes like Laser Induced Chemical Vapor Deposition and Microwave Plasma Chemical Deposition, forming a conformal coating of diamond for cooling channels and a manifold, eliminating the need for diamond removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If subtractive processes (drilling and etching) are used to form diamond cooling structures, then diamond cooling structures can be created, but the fabrication time and cost increase significantly
Solution Approach 1:
Instead of starting with a complete diamond block and removing material through drilling and etching, the patent inverts the approach by starting with a template and selectively depositing diamond only where needed through CVD processes. This additive approach eliminates the time-consuming subtractive processes while maintaining the required cooling channel geometry and diamond's high thermal conductivity.
Solution Approach 2:
The patent employs a template with pre-formed features that defines the cooling channel geometry before diamond deposition. This preliminary structuring allows direct growth of diamond cooling channels without requiring subsequent drilling or etching, significantly reducing fabrication time while ensuring precise geometric control.
2Reliability
If subtractive processes (drilling and etching) are used to form diamond cooling structures, then diamond cooling structures can be created, but the cost and material waste increase
Solution Approach 1:
The patent inverts the traditional subtractive approach by using additive diamond deposition on a template. Diamond is grown only in the specific regions required for cooling channels, eliminating the massive material waste associated with drilling and etching through a solid diamond block, while preserving diamond's superior thermal conductivity in the finished structure.
Solution Approach 2:
The patent applies diamond coating selectively only to the regions required for heat dissipation, rather than processing an entire diamond block. This localized approach minimizes diamond material usage and waste while concentrating the high thermal conductivity property exactly where it is needed for effective cooling.
3Ease of manufacture
If a complete diamond block is used and material is removed, then cooling channels can be formed, but the process becomes complex and inefficient
Solution Approach 1:
The patent uses a template with pre-defined cooling channel features that guides the diamond deposition process. This preliminary preparation eliminates the need for complex drilling and etching operations, simplifying the manufacturing process and significantly improving fabrication efficiency by allowing direct growth of the cooling structure.
Solution Approach 2:
The patent simplifies manufacturing by inverting the traditional approach: instead of complex subtractive processes on a complete diamond block, it uses additive deposition on a template followed by simple template removal. This inversion dramatically reduces process complexity and improves fabrication efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces fabrication time and cost while maintaining high thermal conductivity, enabling efficient heat transfer from integrated circuits.
Implementation Method 1
forming a conformal coating of diamond over the features
Implementation Method 2
grow diamond only in selected areas through additive processes like Laser Induced Chemical Vapor Deposition
Implementation Method 3
grow diamond only in selected areas through additive processes like Microwave Plasma Chemical Deposition
Implementation Method 4
Because of its high thermal conductivity diamond cooling structures have been suggested
Data Source
AI summary
A method for forming a cooling structure having a plurality of cooling members. The method includes: providing a template having a plurality of features, such members projecting outward from a base of a template or holes passing into the template, the features being arranged in a predetermined pattern, such pattern being selected in accordance with the predetermined pattern of cooling members; and forming a conformal coating of diamond over the features.